The 1998 international conference on characterization and metrology for ULSI technology
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scholarly journals NSOMS characterization of semiconductors and related materials

1998 ◽  
Author(s):  
Ran Liu ◽  
Nigel Cave ◽  
Juan Carrejo ◽  
Wei Chen ◽  
Tan-Chen Lee ◽  
...  

scholarly journals Silicon surface preparation for two-dimensional dopant characterization

1998 ◽  
Author(s):  
V. A. Ukraintsev ◽  
F. R. Potts ◽  
R. M. Wallace ◽  
L. K. Magel ◽  
Hal Edwards ◽  
...  
Keyword(s):  
Silicon Surface ◽  
Surface Preparation ◽  
Two Dimensional

scholarly journals Novel metrology for the DUV photolithography sequence

1998 ◽  
Author(s):  
Nickhil Jakatdar ◽  
Xinhui Niu ◽  
Haolin Zhang ◽  
Junwei Bao ◽  
Costas Spanos

At-wavelength interferometry of extreme ultraviolet lithographic optics

1998 ◽  
Author(s):  
Sang Hun Lee ◽  
Patrick Naulleau ◽  
Kenneth Goldberg ◽  
Edita Tejnil ◽  
Hector Medecki ◽  
...  
Keyword(s):  
Extreme Ultraviolet
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