Intelligent Modeling, Diagnosis and Control of Manufacturing Processes
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11

(FIVE YEARS 0)

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1

(FIVE YEARS 0)

Published By WORLD SCIENTIFIC

9789810208172, 9789814503570

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Continuous Equipment Diagnosis Using Evidence Integration - An LPCVD Application -

Intelligent Modeling, Diagnosis and Control of Manufacturing Processes ◽

10.1142/9789814503570_0007 ◽

1992 ◽

pp. 161-181

Author(s):

Norman H. Chang ◽

Costas Spanos

Keyword(s):

Evidence Integration

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Integrated Problem Solving for the Diagnosis of Interacting Process Malfunctions

Intelligent Modeling, Diagnosis and Control of Manufacturing Processes ◽

10.1142/9789814503570_0003 ◽

1992 ◽

pp. 61-82

Author(s):

James K. McDowell ◽

James F. Davis

Keyword(s):

Problem Solving

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Manufacturing Diagnosis and Control: A Task-Specific Approach

Intelligent Modeling, Diagnosis and Control of Manufacturing Processes ◽

10.1142/9789814503570_0001 ◽

1992 ◽

pp. 1-32

Author(s):

William F. Punch ◽

Ashok K. Goel ◽

Jon Sticklen

Keyword(s):

Specific Approach ◽

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Equipment/Instrument Diagnosis with Continuous and Discrete Causal Relationships

Intelligent Modeling, Diagnosis and Control of Manufacturing Processes ◽

10.1142/9789814503570_0008 ◽

1992 ◽

pp. 183-210 ◽

Author(s):

Bei-Tseng B. Chu

Keyword(s):

Causal Relationships

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PROCESS CONTROL SYSTEM FOR VLSI FABRICATION

Intelligent Modeling, Diagnosis and Control of Manufacturing Processes ◽

10.1142/9789814503570_0005 ◽

1992 ◽

pp. 111-137

Author(s):

Emanuel Sachs ◽

Ruey-Shan Guo ◽

Sungdo Ha ◽

Albert Hu

Keyword(s):

Control System ◽

Process Control ◽

Process Control System

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FRONT MATTER

Intelligent Modeling, Diagnosis and Control of Manufacturing Processes ◽

10.1142/9789814503570_fmatter ◽

1992 ◽

pp. i-viii

Author(s):

B-T B Chu ◽

S-S Chen

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INTELLIGENT CONTROL OF SEMICONDUCTOR MANUFACTURING PROCESSES

Intelligent Modeling, Diagnosis and Control of Manufacturing Processes ◽

10.1142/9789814503570_0009 ◽

1992 ◽

pp. 211-230

Author(s):

Su-Shing Chen

Keyword(s):

Intelligent Control ◽

Semiconductor Manufacturing ◽

Manufacturing Processes

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Development and Application of Equipment-Specific Process Models for Semiconductor Manufacturing

Intelligent Modeling, Diagnosis and Control of Manufacturing Processes ◽

10.1142/9789814503570_0006 ◽

1992 ◽

pp. 139-159

Author(s):

Kuang-Kuo Lin ◽

Costas Spanos

Keyword(s):

Semiconductor Manufacturing ◽

Process Models ◽

Specific Process

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A Neural Network Model for Diagnostic Problem Solving

Intelligent Modeling, Diagnosis and Control of Manufacturing Processes ◽

10.1142/9789814503570_0004 ◽

1992 ◽

pp. 83-110

Author(s):

Yun Peng ◽

James A. Reggia

Keyword(s):

Neural Network ◽

Problem Solving ◽

Network Model ◽

Neural Network Model ◽

Diagnostic Problem ◽

Diagnostic Problem Solving

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A Machine Learning Approach to Diagnosis and Control with Applications in Semiconductor Manufacturing

Intelligent Modeling, Diagnosis and Control of Manufacturing Processes ◽

10.1142/9789814503570_0010 ◽

1992 ◽

pp. 231-263

Author(s):

Keki B. Irani ◽

Jie Cheng ◽

Usama M. Fayyad ◽

Zhaogang Qian

Keyword(s):

Machine Learning ◽

Semiconductor Manufacturing ◽

Learning Approach ◽

Machine Learning Approach ◽

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