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International Conference on Extreme Ultraviolet Lithography 2017
Latest Publications
TOTAL DOCUMENTS
60
(FIVE YEARS 0)
H-INDEX
3
(FIVE YEARS 0)
Published By SPIE
9781510613744, 9781510613751
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Front Matter: Volume 10450
International Conference on Extreme Ultraviolet Lithography 2017
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10.1117/12.2293159
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2017
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Author(s):
Proceedings of SPIE
Keyword(s):
Matter Volume
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Edge placement error control and Mask3D effects in High-NA anamorphic EUV lithography
International Conference on Extreme Ultraviolet Lithography 2017
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10.1117/12.2280624
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2017
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Cited By ~ 2
Author(s):
Eelco van Setten
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Gerardo Bottiglieri
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Laurens de Winter
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Jan Lubkoll
◽
John McNamara
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...
Keyword(s):
Error Control
◽
Euv Lithography
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Taking a SHARP look at mask 3D effects
International Conference on Extreme Ultraviolet Lithography 2017
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10.1117/12.2281109
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2017
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Author(s):
Markus P. Benk
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Weilun Chao
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Ryan H. Miyakawa
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Kenneth A. Goldberg
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Patrick P. Naulleau
Keyword(s):
3D Effects
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EUV source optimization driven by fundamental diffraction considerations
International Conference on Extreme Ultraviolet Lithography 2017
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10.1117/12.2280717
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2017
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Cited By ~ 1
Author(s):
Jo Finders
◽
Par Broman
◽
Paul van Adrichem
◽
Erik Wang
◽
Eelco van Setten
◽
...
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Wrinkle formation analysis in extreme-ultraviolet pellicle
International Conference on Extreme Ultraviolet Lithography 2017
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10.1117/12.2281036
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2017
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Author(s):
Hae Nam Jeong
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Guk-Jin Kim
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Sung-Gyu Lee
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Hye-Keun Oh
Keyword(s):
Extreme Ultraviolet
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Classification and printability of EUV mask defects from SEM images
International Conference on Extreme Ultraviolet Lithography 2017
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10.1117/12.2280837
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2017
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Author(s):
Wonil Cho
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Vikram L. Tolani
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Masaki Satake
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Daniel Price
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Paul A. Morgan
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...
Keyword(s):
Sem Images
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A study on enhancing EUV resist sensitivity (2)
International Conference on Extreme Ultraviolet Lithography 2017
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10.1117/12.2280377
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2017
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Author(s):
Atsushi Sekiguchi
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Michiya Naito
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Tetsuo Harada
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Takeo Watanabe
◽
Yoko Matsumoto
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...
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Contrast matching of line gratings obtained with NXE3XXX and EUV- interference lithography
International Conference on Extreme Ultraviolet Lithography 2017
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10.1117/12.2280541
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2017
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Cited By ~ 1
Author(s):
Zuhal Tasdemir
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Yasin Ekinci
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Roberto Fallica
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Iacopo Mochi
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Karen Garrido Olvera
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...
Keyword(s):
Interference Lithography
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Contrast Matching
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Actinic inspection of EUV reticles with arbitrary pattern design
International Conference on Extreme Ultraviolet Lithography 2017
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10.1117/12.2280528
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2017
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Cited By ~ 4
Author(s):
Iacopo Mochi
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Patrick Helfenstein
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Yasin Ekinci
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Dimitrios Kazazis
◽
Shusuke Yoshitake
◽
...
Keyword(s):
Pattern Design
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Thermo-mechanical behavior analysis of extreme-ultraviolet pellicle cooling with H2 flow
International Conference on Extreme Ultraviolet Lithography 2017
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10.1117/12.2280691
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2017
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Author(s):
Sung-Gyu Lee
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Eun-Sang Park
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Hye-Keun Oh
◽
Myung-Gi Kang
Keyword(s):
Mechanical Behavior
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Behavior Analysis
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Extreme Ultraviolet
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