Edge placement error control and Mask3D effects in High-NA anamorphic EUV lithography

International Conference on Extreme Ultraviolet Lithography 2017 ◽

10.1117/12.2280624 ◽

2017 ◽

Author(s):

Eelco van Setten ◽

Gerardo Bottiglieri ◽

Laurens de Winter ◽

Jan Lubkoll ◽

John McNamara ◽

...

Keyword(s):

Error Control ◽

Euv Lithography

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Reliable Methods for Computer Simulation - Error Control and A Posteriori Estimates

10.1016/s0168-2024(04)x8001-2 ◽

2004 ◽

Keyword(s):

Computer Simulation ◽

Error Control ◽

A Posteriori ◽

A Posteriori Estimates ◽

Simulation Error ◽

Reliable Methods

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Evaluation of hybrid error control systems

IEE Proceedings F Communications Radar and Signal Processing ◽

10.1049/ip-f-1.1984.0031 ◽

1984 ◽

Vol 131 (2) ◽

pp. 183

Author(s):

D. Drajić ◽

B. Vučetić

Keyword(s):

Control Systems ◽

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Introduction : Recent Activities of EUV Lithography

The Journal of the Institute of Electrical Engineers of Japan ◽

10.1541/ieejjournal.128.668 ◽

2008 ◽

Vol 128 (10) ◽

pp. 668-668

Author(s):

Hiroo KINOSHITA

Keyword(s):

Euv Lithography

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ADAPTIVE WAVELET ALGORITHM FOR SOLVING NONLINEAR INITIAL–BOUNDARY VALUE PROBLEMS WITH ERROR CONTROL

International Journal for Multiscale Computational Engineering ◽

10.1615/intjmultcompeng.2018024915 ◽

2018 ◽

Vol 16 (1) ◽

pp. 19-43 ◽

Author(s):

C. Harnish ◽

Karel Matous ◽

D. Livescu

Keyword(s):

Boundary Value Problems ◽

Error Control ◽

Boundary Value ◽

Initial Boundary ◽

Initial Boundary Value Problems ◽

Adaptive Wavelet ◽

Initial Boundary Value ◽

Wavelet Algorithm

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Error Control for Molecular Statics Problems

International Journal for Multiscale Computational Engineering ◽

10.1615/intjmultcompeng.v4.i5-6.60 ◽

2006 ◽

Vol 4 (5-6) ◽

pp. 647-662 ◽

Author(s):

Serge Prudhomme ◽

Paul T. Bauman ◽

J. Tinsley Oden, Professor

Keyword(s):

Error Control ◽

Molecular Statics

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Statistical Sample Size Determination for Uncertainty Quantification and Error Control in Validation of Simulation Experiments

50th AIAA Aerospace Sciences Meeting including the New Horizons Forum and Aerospace Exposition ◽

10.2514/6.2012-626 ◽

2012 ◽

Author(s):

John Doty

Keyword(s):

Sample Size ◽

Uncertainty Quantification ◽

Error Control ◽

Sample Size Determination ◽

Size Determination ◽

Simulation Experiments ◽

Statistical Sample

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Bit Weighting and Soft Decision Demodulation for Image Compression & Error Control.

10.21236/ada134187 ◽

1983 ◽

Author(s):

J. D. Gibson ◽

N. C. Griswold

Keyword(s):

Image Compression ◽

Error Control ◽

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Option pricing by transform methods: extensions, unification and error control

The Journal of Computational Finance ◽

10.21314/jcf.2004.121 ◽

2004 ◽

Vol 7 (3) ◽

pp. 51-86 ◽

Author(s):

Roger Lee

Keyword(s):

Option Pricing ◽

Error Control ◽

Transform Methods

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Statistical frame acquisition by co-ordinated use of error control redundancy.

10.22215/etd/1972-12262 ◽

1972 ◽

Author(s):

Theodoros. Antonacopoulos

Keyword(s):

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New simulation techniques for evaluating telecommunications transmission systems with forward error control

5th IEE Conference on Telecommunications ◽

10.1049/cp:19950119 ◽

1995 ◽

Author(s):

Y. Bian

Keyword(s):

Error Control ◽

Transmission Systems ◽

Simulation Techniques ◽

Forward Error Control ◽

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