Thermo-mechanical behavior analysis of extreme-ultraviolet pellicle cooling with H2 flow

Author(s):  
Sung-Gyu Lee ◽  
Eun-Sang Park ◽  
Hye-Keun Oh ◽  
Myung-Gi Kang
2010 ◽  
Vol 20 (3) ◽  
pp. 1916-1919 ◽  
Author(s):  
Peng Chen ◽  
Yinming Dai ◽  
Qiuliang Wang ◽  
Quan Zhang

2016 ◽  
Vol 33 ◽  
pp. 240-254 ◽  
Author(s):  
Liangjie Mao ◽  
Qingyou Liu ◽  
Shouwei Zhou ◽  
Guorong Wang ◽  
Qiang Fu

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