Nanolithography and Patterning Techniques in Microelectronics
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9781855739314
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Chemomechanical surface modification of materials for patterning

2005 ◽  
pp. 120-154 ◽  
Author(s):  
M. Linford ◽  
R. Davis ◽  
S. Magleby ◽  
L. Howell ◽  
G. Jiang ◽  
...  
Keyword(s):  
Surface Modification ◽  
Modification Of Materials

Patterning of polymer thin films

2005 ◽  
pp. 155-183 ◽  
Author(s):  
P.J. Yoo ◽  
K.Y. Suh ◽  
Y.S. Kim ◽  
D.-Y. Khang ◽  
H.H. Lee
Keyword(s):  
Thin Films ◽  
Polymer Thin Films

Block copolymer nanolithography

2005 ◽  
pp. 1-38 ◽  
Author(s):  
M. Trawick ◽  
D. Angelescu ◽  
P. Chaikin ◽  
R. Register
Keyword(s):  
Block Copolymer
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