Laser Heat-Mode Lithography - Springer Series in Materials Science
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9789811509421, 9789811509438

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Laser Heat-Mode Grayscale Lithography

Laser Heat-Mode Lithography - Springer Series in Materials Science ◽

10.1007/978-981-15-0943-8_8 ◽

2019 ◽

pp. 169-189

Author(s):

Jingsong Wei

Keyword(s):

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High-Speed Laser Heat-Mode Lithography on Chalcogenide Resists

Laser Heat-Mode Lithography - Springer Series in Materials Science ◽

10.1007/978-981-15-0943-8_5 ◽

2019 ◽

pp. 105-121

Author(s):

Jingsong Wei

Keyword(s):

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Manipulation of Thermal Diffusion Channels

Laser Heat-Mode Lithography - Springer Series in Materials Science ◽

10.1007/978-981-15-0943-8_4 ◽

2019 ◽

pp. 81-103

Author(s):

Jingsong Wei

Keyword(s):

Thermal Diffusion

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Laser Heat-Mode Lithography on Transparent Thin Films

Laser Heat-Mode Lithography - Springer Series in Materials Science ◽

10.1007/978-981-15-0943-8_7 ◽

2019 ◽

pp. 141-167

Author(s):

Jingsong Wei

Keyword(s):

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Principles of Laser Heat-Mode Lithography

Laser Heat-Mode Lithography - Springer Series in Materials Science ◽

10.1007/978-981-15-0943-8_2 ◽

2019 ◽

pp. 27-47

Author(s):

Jingsong Wei

Keyword(s):

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Pattern Transfer for Laser Heat-Mode Lithography

Laser Heat-Mode Lithography - Springer Series in Materials Science ◽

10.1007/978-981-15-0943-8_9 ◽

2019 ◽

pp. 191-208

Author(s):

Jingsong Wei

Keyword(s):

Pattern Transfer ◽

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Laser Heat-Mode Lithography Using Organic Thin Films

Laser Heat-Mode Lithography - Springer Series in Materials Science ◽

10.1007/978-981-15-0943-8_6 ◽

2019 ◽

pp. 123-140

Author(s):

Jingsong Wei

Keyword(s):

Organic Thin Films ◽

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High-Speed Rotation-Type Laser Heat-Mode Lithography System

Laser Heat-Mode Lithography - Springer Series in Materials Science ◽

10.1007/978-981-15-0943-8_3 ◽

2019 ◽

pp. 49-79

Author(s):

Jingsong Wei

Keyword(s):

Heat Mode ◽

High Speed Rotation ◽

Speed Rotation ◽

Lithography System

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Current Status of Lithography

Laser Heat-Mode Lithography - Springer Series in Materials Science ◽

10.1007/978-981-15-0943-8_1 ◽

2019 ◽

pp. 1-26

Author(s):

Jingsong Wei

Keyword(s):

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