scholarly journals Mapping electrostatic potentials and deformation in semiconductor devices by off-axis electron holography and other techniques

2016 ◽  
pp. 747-748
Author(s):  
Victor Boureau ◽  
David Cooper ◽  
Nicolas Bernier ◽  
Jean-Luc Rouviere
Keyword(s):  
Semiconductor Devices ◽  
Electrostatic Potentials ◽  
Electron Holography

Off-axis electron holography of electrostatic potentials in unbiased and reverse biased focused ion beam milled semiconductor devices

2004 ◽  
Vol 214 (3) ◽  
pp. 287-296 ◽  
Author(s):  
A. C. TWITCHETT ◽  
R. E. DUNIN-BORKOWSKI ◽  
R. J. HALLIFAX ◽  
R. F. BROOM ◽  
P. A. MIDGLEY
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Semiconductor Devices ◽  
Electrostatic Potentials ◽  
Electron Holography

scholarly journals Towards Mapping Electrostatic Potentials in Semiconductor Devices Under Working Conditions Using Off-Axis Electron Holography

2013 ◽  
Vol 19 (S2) ◽  
pp. 1358-1359 ◽  
Author(s):  
S. Yazdi ◽  
T. Kasama ◽  
D.W. McComb ◽  
A.C. Harrison ◽  
R.E. Dunin-Borkowski
Keyword(s):  
Working Conditions ◽  
Semiconductor Devices ◽  
Electrostatic Potentials ◽  
Electron Holography

Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

An Ultra-High-Tilt Two-Contact Electrical Biasing Specimen Holder for Electron Holography and Electron Tomography of Semiconductor Devices

2004 ◽  
Vol 10 (S02) ◽  
pp. 1012-1013 ◽  
Author(s):  
Rafal E Dunin-Borkowski ◽  
Alison C Twitchett ◽  
Jonathan S Barnard ◽  
Ronald F Broom ◽  
Paul A Midgley ◽  
...  
Keyword(s):  
Electron Tomography ◽  
Semiconductor Devices ◽  
Electron Holography ◽  
Specimen Holder

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Field mapping of focused ion beam prepared semiconductor devices by off-axis and dark field electron holography

2013 ◽  
Vol 28 (12) ◽  
pp. 125013 ◽  
Author(s):  
David Cooper ◽  
Pierrette Rivallin ◽  
Georges Guegan ◽  
Christophe Plantier ◽  
Eric Robin ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Semiconductor Devices ◽  
Dark Field ◽  
Electron Holography ◽  
Field Mapping ◽  
Field Electron ◽  
Dark Field Electron

scholarly journals Practical Considerations for Electron Holography on Doped Semiconductor Devices

2002 ◽  
Vol 8 (S02) ◽  
pp. 516-517
Author(s):  
Alexander Thesen ◽  
Bernhard G. Frost ◽  
David C. Joy
Keyword(s):  
Semiconductor Devices ◽  
Electron Holography
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