An Ultra-High-Tilt Two-Contact Electrical Biasing Specimen Holder for Electron Holography and Electron Tomography of Semiconductor Devices

2004 ◽  
Vol 10 (S02) ◽  
pp. 1012-1013 ◽  
Author(s):  
Rafal E Dunin-Borkowski ◽  
Alison C Twitchett ◽  
Jonathan S Barnard ◽  
Ronald F Broom ◽  
Paul A Midgley ◽  
...  
Keyword(s):  
Electron Tomography ◽  
Semiconductor Devices ◽  
Electron Holography ◽  
Specimen Holder

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

The Prospect of Three-Dimensional Induction Mapping Inside Magnetic Nanostructures by Combining Electron Holography with Electron Tomography

2004 ◽  
Vol 10 (S02) ◽  
pp. 1010-1011 ◽  
Author(s):  
Rafal E Dunin-Borkowski ◽  
Takeshi Kasama
Keyword(s):  
Electron Tomography ◽  
Three Dimensional ◽  
Magnetic Nanostructures ◽  
Electron Holography

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Field mapping of focused ion beam prepared semiconductor devices by off-axis and dark field electron holography

2013 ◽  
Vol 28 (12) ◽  
pp. 125013 ◽  
Author(s):  
David Cooper ◽  
Pierrette Rivallin ◽  
Georges Guegan ◽  
Christophe Plantier ◽  
Eric Robin ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Semiconductor Devices ◽  
Dark Field ◽  
Electron Holography ◽  
Field Mapping ◽  
Field Electron ◽  
Dark Field Electron

Off-axis electron holography of electrostatic potentials in unbiased and reverse biased focused ion beam milled semiconductor devices

2004 ◽  
Vol 214 (3) ◽  
pp. 287-296 ◽  
Author(s):  
A. C. TWITCHETT ◽  
R. E. DUNIN-BORKOWSKI ◽  
R. J. HALLIFAX ◽  
R. F. BROOM ◽  
P. A. MIDGLEY
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Semiconductor Devices ◽  
Electrostatic Potentials ◽  
Electron Holography

scholarly journals Practical Considerations for Electron Holography on Doped Semiconductor Devices

2002 ◽  
Vol 8 (S02) ◽  
pp. 516-517
Author(s):  
Alexander Thesen ◽  
Bernhard G. Frost ◽  
David C. Joy
Keyword(s):  
Semiconductor Devices ◽  
Electron Holography

High-accuracy electron tomography of semiconductor devices

2015 ◽  
Vol 21 (S3) ◽  
pp. 1609-1610 ◽  
Author(s):  
Misa Hayashida ◽  
Lina Gunawan ◽  
Marek Malac ◽  
Chris Pawlowicz ◽  
Martin Couillard
Keyword(s):  
Electron Tomography ◽  
Semiconductor Devices ◽  
High Accuracy

Electron Tomography of Semiconductor Devices

2007 ◽  
Vol 13 (S02) ◽  
Author(s):  
P Ercius ◽  
DA Muller ◽  
M Weyland ◽  
L Gignac
Keyword(s):  
Electron Tomography ◽  
Semiconductor Devices

scholarly journals Advances in Elemental Electron Tomography for the State-of-the-art Semiconductor Devices and Circuits Characterization and Failure Analysis

2017 ◽  
Vol 23 (S1) ◽  
pp. 1456-1457 ◽  
Author(s):  
B. Fu ◽  
M Gribelyuk ◽  
Frieder H. Baumann ◽  
C. Fang ◽  
Wayne Zhao ◽  
...  
Keyword(s):  
Failure Analysis ◽  
State Of The Art ◽  
Electron Tomography ◽  
Semiconductor Devices ◽  
The State

scholarly journals Multivariate Analysis and Compressed Sensing Methods for Spectroscopic Electron Tomography of Semiconductor Devices

2018 ◽  
Vol 24 (S1) ◽  
pp. 500-501 ◽  
Author(s):  
Martin Jacob ◽  
Toby Sanders ◽  
Nicolas Bernier ◽  
Adeline Grenier ◽  
Rafael Bortolin Pinheiro ◽  
...  
Keyword(s):  
Multivariate Analysis ◽  
Compressed Sensing ◽  
Electron Tomography ◽  
Semiconductor Devices
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