ChemInform Abstract: THE KINETICS OF SILICON DEPOSITION ON SILICON BY PYROLYSIS OF SILANE, A MASS SPECTROMETRIC INVESTIGATION BY MOLECULAR BEAM SAMPLING
1968 ◽
Vol 90
(10)
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pp. 2557-2560
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1998 ◽
Vol 7
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pp. 1651-1656
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2019 ◽
Vol 37
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pp. 5577-5586
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1989 ◽
Vol 18
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pp. 12-19
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