ChemInform Abstract: THE INCORPORATION OF PHOSPHORUS IN SILICON EPITAXIAL LAYER GROWTH
1975 ◽
Vol 122
(6)
◽
pp. 840-842
◽
1974 ◽
Vol 121
(10)
◽
pp. 1354
◽
1984 ◽
Vol 131
(8)
◽
pp. 1900-1906
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2019 ◽