The Mechanism of Silicon Epitaxial Layer Growth from Ion-Molecular Beams

1979 ◽  
Vol 54 (2) ◽  
pp. 463-469 ◽  
Author(s):  
L. N. Aeksandrov ◽  
A. S. Ltovich ◽  
E. D. Blorusets
Keyword(s):  
Epitaxial Layer ◽  
Molecular Beams ◽  
Layer Growth ◽  
Silicon Epitaxial Layer

The Incorporation of Phosphorus in Silicon Epitaxial Layer Growth

1974 ◽  
Vol 121 (10) ◽  
pp. 1354 ◽  
Author(s):  
J. Bloem ◽  
L. J. Giling ◽  
M. W. M. Graef
Keyword(s):  
Epitaxial Layer ◽  
Layer Growth ◽  
Silicon Epitaxial Layer ◽  
Phosphorus In Silicon
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