Development of quartz crystal complex capacitive sensor with microelectrode array for sensitization

2021 ◽  
Vol 214 (4) ◽  
Author(s):  
Yuki Hashimoto ◽  
Takaaki Haino ◽  
Masayuki Sohgawa ◽  
Takashi Abe

2021 ◽  
Vol 141 (8) ◽  
pp. 279-283
Author(s):  
Yuki Hashimoto ◽  
Takaaki Haino ◽  
Masayuki Sohgawa ◽  
Takashi Abe




2014 ◽  
Vol 14 (6) ◽  
pp. 2012-2018 ◽  
Author(s):  
Xing Ding ◽  
Xiangdong Chen ◽  
Xiaoyu Li ◽  
Zuquan Wu ◽  
Yao Yao


2012 ◽  
Vol 12 (6) ◽  
pp. 2145-2149 ◽  
Author(s):  
Han Lei ◽  
Xiangdong Chen ◽  
Yao Yao ◽  
Xiaoyu Li


Author(s):  
R. W. Vook ◽  
R. Cook ◽  
R. Ziemer

During recent experiments on Au films, a qualitative correlation between hole formation and deposition rate was observed. These early studies were concerned with films 80 to 1000A thick deposited on glass at -185°C and annealed at 170°C. In the present studies this earlier work was made quantitative. Deposition rates varying between 5 and 700 A/min were used. The effects of deposition rate on hole density for two films 300 and 700A thick were investigated.Au was evaporated from an outgassed W filament located 10 cm from a glass microscope slide substrate and a quartz crystal film thickness monitor. A shutter separating the filament from the substrate and monitor made it possible to obtain a constant evaporation rate before initiating deposition. The pressure was reduced to less than 1 x 10-6 torr prior to cooling the substrate with liquid nitrogen. The substrate was cooled in 15 minutes during which the pressure continued to drop to the mid 10-7 torr range, where deposition was begun.



1983 ◽  
Vol 130 (4) ◽  
pp. 145 ◽  
Author(s):  
R.J. Holbeche ◽  
G. Allen


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