Auger electron spectroscopy and ion scattering spectroscopy studies of altered layer formation in AlN thin film prepared by post-irradiation with N2+ ions

2002 ◽  
Vol 33 (5) ◽  
pp. 437-440 ◽  
Author(s):  
Y. Mizuhara ◽  
R. Mitsuhashi ◽  
T. Nagatomi ◽  
Y. Takai ◽  
M. Inoue
Keyword(s):  
Thin Film ◽  
Auger Electron Spectroscopy ◽  
Electron Spectroscopy ◽  
Auger Electron ◽  
Layer Formation ◽  
Ion Scattering ◽  
Post Irradiation ◽  
Altered Layer ◽  
Ion Scattering Spectroscopy ◽  
Spectroscopy Studies
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