scholarly journals Summary of ISO/TC 201 International Standard ISO 18516:2019 Surface chemical analysis—Determination of lateral resolution and sharpness in beam‐based methods with a range from nanometres to micrometres and its implementation for imaging laboratory X‐ray photoelectron spectrometers (XPS)

2021 ◽  
Author(s):  
Wolfgang E. S. Unger ◽  
Mathias Senoner ◽  
Jörg M. Stockmann ◽  
Vincent Fernandez ◽  
Neal Fairley ◽  
...  
Keyword(s):  
Chemical Analysis ◽  
Lateral Resolution ◽  
Surface Chemical ◽  
X Ray ◽  
International Standard ◽  
Surface Chemical Analysis ◽  
Analysis Determination
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