In this work, we investigate the hierarchical surface topography of solid oxide fuel cell electrolytes consisting of zirconia stabilized with 10% Sc2O3 and 1% CeO2 (1Ce10ScSZ) synthesized at 1250-1550°C and anodes of 60 wt% 1Ce10ScSZ and 40 wt% NiO synthesized at 1300 to 1400°C. The fractal dimension of AFM images of the films was determined by the triangulation method. The obtained powers spectral density function was in good agreement with the k-correlation model indicating a self-affine surface topography.