Generalized Ellipsometry Characterization of Sculptured Thin Films Made by Glancing Angle Deposition

2013 ◽  
pp. 341-410 ◽  
Author(s):  
Daniel Schmidt ◽  
Eva Schubert ◽  
Mathias Schubert
Keyword(s):  
Thin Films ◽  
Glancing Angle Deposition ◽  
Sculptured Thin Films ◽  
Glancing Angle ◽  
Angle Deposition

Infrared behavior of aluminum nanostructure sculptured thin films

2008 ◽  
Vol 1080 ◽  
Author(s):  
Tino Hofmann ◽  
M. Schubert ◽  
D. Schmidt ◽  
E. Schubert
Keyword(s):  
Thin Films ◽  
Schottky Diodes ◽  
Glancing Angle Deposition ◽  
Wire Sample ◽  
Sculptured Thin Films ◽  
Glancing Angle ◽  
Infrared Spectral ◽  
Nanowire Sample ◽  
P Type

ABSTRACTWe report on fabrication, structural and infrared optical characterization of nanostructure aluminum sculptured thin films prepared by glancing angle deposition (GLAD) and controlled substrate motion on p-type silicon. We discuss two structures, one with plate-like and one with screw-like (chiral) morphology. While the plate-like sample possesses a metal Drude behavior in the infrared spectral range, the chiral nanowire sample behaves non-metallic and reveals a series of intriguing resonances, which are equally spaced in frequency by ∼7.5 THz. We suggest that formation of 3D nano resonator circuits consisting of inductances and capacitances has occurred within the screw-like conductive aluminum wire sample, which might be responsible for the observed resonances. We suggest conductive GLAD nanostructures in combination with Schottky diodes to facilitate active or passive THz detector and transmitter devices.

Preparation and characterization of nanostructured ZrO2 thin films by glancing angle deposition

2007 ◽  
Vol 515 (7-8) ◽  
pp. 3352-3355 ◽  
Author(s):  
Sumei Wang ◽  
Guodong Xia ◽  
Xiaoyong Fu ◽  
Hongbo He ◽  
Jianda Shao ◽  
...  
Keyword(s):  
Thin Films ◽  
Glancing Angle Deposition ◽  
Glancing Angle ◽  
Angle Deposition

Structure and optical properties of Nb2O5 sculptured thin films by glancing angle deposition

2008 ◽  
Vol 255 (5) ◽  
pp. 2192-2195 ◽  
Author(s):  
Xiudi Xiao ◽  
Guoping Dong ◽  
Cheng Xu ◽  
Hongbo He ◽  
Hongji Qi ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Glancing Angle Deposition ◽  
Sculptured Thin Films ◽  
Glancing Angle ◽  
Angle Deposition

Investigation of growth and characterization of nanostructured CuIn5S8 thin films produced by glancing angle deposition

2015 ◽  
Vol 590 ◽  
pp. 111-117 ◽  
Author(s):  
A. Sinaoui ◽  
F. Chaffar-Akkari ◽  
B. Gallas ◽  
D. Demaille ◽  
M. Kanzari
Keyword(s):  
Thin Films ◽  
Glancing Angle Deposition ◽  
Glancing Angle ◽  
Angle Deposition

Electrical characterization of Ag:TiN thin films produced by glancing angle deposition

2014 ◽  
Vol 115 ◽  
pp. 136-139 ◽  
Author(s):  
P. Pedrosa ◽  
C. Lopes ◽  
N. Martin ◽  
C. Fonseca ◽  
F. Vaz
Keyword(s):  
Thin Films ◽  
Electrical Characterization ◽  
Glancing Angle Deposition ◽  
Glancing Angle ◽  
Angle Deposition
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