Homogeneity analysis of sculptured thin films deposited in symmetric style through glancing angle deposition technique

2014 ◽  
Vol 23 (11) ◽  
pp. 117801
Author(s):  
Bin Wang ◽  
Hong-Ji Qi ◽  
Wei Sun ◽  
Jun He ◽  
Jiao-Ling Zhao ◽  
...  
Keyword(s):  
Thin Films ◽  
Glancing Angle Deposition ◽  
Deposition Technique ◽  
Homogeneity Analysis ◽  
Sculptured Thin Films ◽  
Glancing Angle ◽  
Angle Deposition

Nanoindentation of Microspring Thin Films

2000 ◽  
Vol 657 ◽  
Author(s):  
Mary W. Seto ◽  
Brian Dick ◽  
Michael J. Brett
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Glancing Angle Deposition ◽  
Nanometer Scale ◽  
Deposition Technique ◽  
Porous Thin Films ◽  
Glancing Angle ◽  
Scale Control ◽  
Angle Deposition ◽  
Insight Into

ABSTRACTPorous thin films with helical microstructures were fabricated with the Glancing Angle Deposition technique. These films consisted of arrays of “microsprings” whose geometries could be engineered with nanometer scale control. Some of the mechanical properties of these helically structured films were studied with a nanoindentation technique. Several microscopic “springbed” films were tested over a range of forces using a spherical indenter tip. The geometries of the microsprings were varied, and a number of different materials were used to fabricate these films, which were typically a few micrometers thick. Slanted post arrays, resembling micro-cantilevers, were also subjected to nanoindentation tests. Results of initial experiments, theory, and simulations show that these microstructures behave in a manner analogous to macroscopic springs and cantilevers, and may offer some insight into how materials behave at the microscale.

Structure and optical properties of Nb2O5 sculptured thin films by glancing angle deposition

2008 ◽  
Vol 255 (5) ◽  
pp. 2192-2195 ◽  
Author(s):  
Xiudi Xiao ◽  
Guoping Dong ◽  
Cheng Xu ◽  
Hongbo He ◽  
Hongji Qi ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Glancing Angle Deposition ◽  
Sculptured Thin Films ◽  
Glancing Angle ◽  
Angle Deposition

scholarly journals Structural, chemical and magnetic properties of nickel vertical posts obtained by glancing angle deposition technique

2017 ◽  
Vol 49 (1) ◽  
pp. 73-79
Author(s):  
Jelena Potocnik ◽  
Milos Nenadovic ◽  
Bojan Jokic ◽  
Maja Popovic ◽  
Zlatko Rakocevic
Keyword(s):  
Thin Film ◽  
Magnetic Properties ◽  
Photoelectron Spectroscopy ◽  
Glancing Angle Deposition ◽  
Deposition Technique ◽  
Force Microscopy ◽  
Atomic Force ◽  
Glancing Angle ◽  
Magneto Optical Kerr Effect ◽  
Angle Deposition

In this work, Glancing Angle Deposition technique was used for obtaining nanostructured nickel thin film with vertical posts on glass substrate which was positioned 75 degrees with respect to the substrate normal and rotated with a suitable constant speed. The obtained nickel thin film was characterized by Scanning Electron Microscopy, Atomic Force Microscopy and X-ray Photoelectron Spectroscopy. It was found that the deposited thin film consists of 94.0 at.% of nickel. Magnetic properties of the deposited thin film were determined by Magneto-Optical Kerr Effect Microscopy. According to the obtained coercivity values, it can be concluded that the nickel thin film shows uniaxial magnetic anisotropy.

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