Evaluation Of The Gap State Distribution In a-Si:H By SCLC Measurements

Author(s):  
A. Eray ◽  
G. Nobile
Keyword(s):  
2003 ◽  
Vol 762 ◽  
Author(s):  
M. Schmidt ◽  
A. Schoepke ◽  
O. Milch ◽  
Th. Lussky ◽  
W. Fuhs

AbstractWe report on a detailed study on gap-state distribution in thin amorphous silicon layers (a-Si:H) with film thicknesses between 5 nm and 20 nm on c-Si wafers performed by UV excited photoelectron spectroscopy (UV-PES). We measured how the work function, the gap state density, the position of the Fermi-level and the Urbach-energy depend on the layer thickness and the doping level of the ultra thin a-Si:H(n) layers. It was found, that for phosphorous doping the position of the Fermi level saturates at EF–EV=1.47 eV. This is achieved at a gas phase concentration of 10000 ppm PH3 in the SiH4/H2 mixture which was used for the PECVD deposition process. The variation of the doping level from 0 to 20000 ppm PH3 addition results in an increase of the Urbach energy from 65 meV to 101 meV and in an increase of the gap state density at midgap (EV-Ei= 0.86eV) from 3·1018 to 2·1019 cm-3eV-1.


1983 ◽  
Vol 59-60 ◽  
pp. 545-548 ◽  
Author(s):  
C.-Y. Huang ◽  
S. Guha ◽  
S.J. Hudgens
Keyword(s):  

1989 ◽  
Vol 60 (5) ◽  
pp. 713-720 ◽  
Author(s):  
F. Demichelis ◽  
G. Kaniadakis ◽  
R. Spagnolo ◽  
E. Tresso

1992 ◽  
Author(s):  
Gottfried H. Bauer ◽  
C.-D. Abel ◽  
G. Schumm
Keyword(s):  

1990 ◽  
Vol 192 ◽  
Author(s):  
G. Schumm ◽  
G. H. Bauer

ABSTRACTModulated primary photocurrent (MPC) studies on pin structures show spatial variations of the gap state distribution across the i-layer that can be correlated with Fermi level shifts by band bending towards interfaces. These results as well as reverse bias annealing effects are explained in terms of the defect pool model. It is demonstrated that MPC measurements are basically identical to TOF measurements with clear advantages in the post-transit time regime.


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