Microwave plasma CVD and related techniques for low pressure diamond synthesis

1994 ◽  
pp. 31-53 ◽  
Author(s):  
Peter K. Bachmann
Keyword(s):  
Microwave Plasma ◽  
Low Pressure ◽  
Diamond Synthesis ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd

Growth of diamond films at low pressure using magneto-microwave plasma CVD

1990 ◽  
Vol 99 (1-4) ◽  
pp. 1201-1205 ◽  
Author(s):  
Jin Wei ◽  
Hiroshi Kawarada ◽  
Jun-ichi Suzuki ◽  
Akio Hiraki
Keyword(s):  
Microwave Plasma ◽  
Diamond Films ◽  
Low Pressure ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd

Hot Spot Formation in Microwave Plasma CVD Diamond Synthesis

2011 ◽  
Vol 39 (11) ◽  
pp. 2790-2791 ◽  
Author(s):  
Kadek W. Hemawan ◽  
Chih S. Yan ◽  
Qi Liang ◽  
Joseph Lai ◽  
Yufei Meng ◽  
...  
Keyword(s):  
Microwave Plasma ◽  
Hot Spot ◽  
Cvd Diamond ◽  
Diamond Synthesis ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd ◽  
Hot Spot Formation ◽  
Spot Formation

Effects of Mo(CO)6 and W(CO)6 introduced to plasma on diamond synthesis by microwave plasma CVD

1997 ◽  
Vol 6 (2-4) ◽  
pp. 501-504 ◽  
Author(s):  
Masamitsu Nagano ◽  
Takashi Urasaki ◽  
Kazuhiro Wakiyama ◽  
Masaharu Komori
Keyword(s):  
Microwave Plasma ◽  
Diamond Synthesis ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd
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