scholarly journals Relationship between Emission Spectrum and B Content in B Doped Diamond Synthesis using Mode Conversion Type Microwave Plasma CVD

2020 ◽  
Vol 71 (7) ◽  
pp. 473-477
Author(s):  
Asuka SUZUKI ◽  
Takuya MARUKO ◽  
Yoshihiro TAKAHASHI ◽  
Yukihiro SAKAMOTO
Keyword(s):  
Emission Spectrum ◽  
Microwave Plasma ◽  
Mode Conversion ◽  
Diamond Synthesis ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd

Hot Spot Formation in Microwave Plasma CVD Diamond Synthesis

2011 ◽  
Vol 39 (11) ◽  
pp. 2790-2791 ◽  
Author(s):  
Kadek W. Hemawan ◽  
Chih S. Yan ◽  
Qi Liang ◽  
Joseph Lai ◽  
Yufei Meng ◽  
...  
Keyword(s):  
Microwave Plasma ◽  
Hot Spot ◽  
Cvd Diamond ◽  
Diamond Synthesis ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd ◽  
Hot Spot Formation ◽  
Spot Formation

Effects of Mo(CO)6 and W(CO)6 introduced to plasma on diamond synthesis by microwave plasma CVD

1997 ◽  
Vol 6 (2-4) ◽  
pp. 501-504 ◽  
Author(s):  
Masamitsu Nagano ◽  
Takashi Urasaki ◽  
Kazuhiro Wakiyama ◽  
Masaharu Komori
Keyword(s):  
Microwave Plasma ◽  
Diamond Synthesis ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd

scholarly journals Effect of different additive gases on diamond synthesis by microwave plasma CVD.

1989 ◽  
Vol 40 (2) ◽  
pp. 301-305 ◽  
Author(s):  
Chia-Fu CHEN ◽  
Yen C. HUANG ◽  
Satoru HOSOMI ◽  
Isao YOSHIDA
Keyword(s):  
Microwave Plasma ◽  
Diamond Synthesis ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd
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