Determination of in-situ mixed mode fracture parameters

1993 ◽  
Vol 70 (3) ◽  
pp. R63-R68
Author(s):  
X. L. Zhao
Author(s):  
Chenglin Wu ◽  
Congjie Wei ◽  
Yanxiao Li

In-situ nanoindentation experiment has been widely adopted to characterize material behaviors of microelectronic devices. This work introduces the latest developments of nanoindentation experiment in characterizing nonlinear material properties of 3D integrated microelectronic devices with through-silicon-vias (TSVs). The elastic, plastic, and interfacial fracture behavior of the copper via and matrix-via interface have been characterized using small scale specimens prepared with focused-ion-beam (FIB) and nanoindentation experiment. A brittle interfacial fracture was found at the Cu/Si interface under mixed-mode loading with a phase angle ranging from 16.7 to 83.7 degrees. The mixed-mode fracture strengths were extracted using the linear elastic fracture mechanics (LEFM) analysis and a fracture criterion was obtained by fitting the extracted data with the power-law function. The vectorial interfacial strength and toughness were found to be independent with mode-mix.


Author(s):  
Saeid Ghouli ◽  
Majid R. Ayatollahi ◽  
Bahador Bahrami ◽  
Jamaloddin Jamali

2021 ◽  
Vol 11 (4) ◽  
pp. 1652
Author(s):  
Xin Pan ◽  
Jiuzhou Huang ◽  
Zhiqiang Gan ◽  
Shiming Dong ◽  
Wen Hua

The crack-propagation form may appear as an arbitrary mixed-mode fracture in an engineering structure due to an irregular internal crack. It is of great significance to research the mixed-mode fracture of materials with cracks. The coupling effect of multiple variables (crack height ratio, horizontal deflection angle and vertical deflection angle) on fracture parameters such as the stress intensity factors and the T-stress are the key points in this paper. A three-point bending specimen with an inclined crack was proposed and used to conduct mixed-mode fracture research. The fracture parameters were obtained by finite element analysis, and the computed results showed that the pure mode I fracture and mixed-mode fractures (mode I/II, mode I/III and mode I/II/III) can be realized by changing the deflection angles of the crack. The pure mode I and the mixed-mode fracture toughness of sandstone were obtained by a series of mixed-mode fracture experiments. The experimental results were analyzed with the generalized maximum tangential strain energy density factor criterion considering T-stress. The results showed that the non-singular term T-stress in the fracture parameters cannot be ignored in any mixed-mode fracture research, and the generalized maximum tangential strain energy density factor criterion considering T-stress can better predict the mixed-mode fracture toughness than other criteria.


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