Hydrogenated amorphous silicon films obtained by a low pressure dc glow discharge

Applied Physics A Solids and Surface ◽

10.1007/bf00939265 ◽

1988 ◽

Vol 46 (3) ◽

pp. 207-213 ◽

Author(s):

J. C. Delgado ◽

J. Andreu ◽

G. Sardin ◽

J. Esteve ◽

J. L. Morenza

Keyword(s):

Glow Discharge ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Low Pressure ◽

Silicon Films ◽

Dc Glow Discharge ◽

Hydrogenated Amorphous

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Effect of power and pressure on the properties of hydrogenated amorphous silicon films prepared by DC glow discharge

Solar Energy Materials and Solar Cells ◽

10.1016/0927-0248(93)90052-5 ◽

1993 ◽

Vol 31 (2) ◽

pp. 215-226 ◽

Author(s):

T SETH ◽

P DIXIT ◽

O PANWAR ◽

R BHATTACHARYYA

Keyword(s):

Glow Discharge ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Silicon Films ◽

Dc Glow Discharge ◽

Hydrogenated Amorphous

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Preparation and characterization of hydrogenated amorphous-silicon films produced by ion plating and hydrogenated amorphous-boron films produced by glow-discharge decomposition. Final report, April 1, 1980-May 31, 1981

10.2172/5962055 ◽

1981 ◽

Author(s):

F. Cocks ◽

P. Jones

Keyword(s):

Glow Discharge ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Silicon Films ◽

Final Report ◽

Amorphous Boron ◽

Ion Plating ◽

Hydrogenated Amorphous

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The influence of preparation parameters on the deposition rate, density and optical properties of thin hydrogenated amorphous silicon films prepared by r.f. glow discharge

Thin Solid Films ◽

10.1016/0040-6090(87)90396-8 ◽

1987 ◽

Vol 149 (3) ◽

pp. 331-340 ◽

Author(s):

G Myburg ◽

R Swanepoel

Keyword(s):

Optical Properties ◽

Glow Discharge ◽

Amorphous Silicon ◽

Deposition Rate ◽

Hydrogenated Amorphous Silicon ◽

Silicon Films ◽

Hydrogenated Amorphous

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Light-induced conductivity changes in hydrogenated amorphous silicon films prepared in cascaded glow discharge reactors

Thin Solid Films ◽

10.1016/0040-6090(86)90123-9 ◽

1986 ◽

Vol 135 (2) ◽

pp. 165-172 ◽

Author(s):

O.S. Panwar ◽

P.N. Dixit ◽

R. Bhattacharyya ◽

V.V. Shah

Keyword(s):

Glow Discharge ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Silicon Films ◽

Hydrogenated Amorphous

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Heterogeneities and surface effects in glow discharge deposited hydrogenated amorphous silicon films

Thin Solid Films ◽

10.1016/0040-6090(82)90631-9 ◽

1982 ◽

Vol 90 (2) ◽

pp. 119-129 ◽

Author(s):

H. Fritzsche

Keyword(s):

Glow Discharge ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Surface Effects ◽

Silicon Films ◽

Hydrogenated Amorphous

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Optimisation of the RF power density to obtain good quality hydrogenated amorphous silicon films in a home-made glow discharge system

Optical Materials ◽

10.1016/j.optmat.2003.08.004 ◽

2004 ◽

Vol 25 (3) ◽

pp. 335-339 ◽

Author(s):

Akın Bacıoğlu ◽

Alp Osman Kodolbaş ◽

Özcan Öktü

Keyword(s):

Glow Discharge ◽

Amorphous Silicon ◽

Power Density ◽

Hydrogenated Amorphous Silicon ◽

Silicon Films ◽

Rf Power ◽

Discharge System ◽

Hydrogenated Amorphous

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Effect of silane dilution on intrinsic stress in glow discharge hydrogenated amorphous silicon films

Journal of Applied Physics ◽

10.1063/1.333148 ◽

1984 ◽

Vol 55 (4) ◽

pp. 946-951 ◽

Author(s):

J. P. Harbison ◽

A. J. Williams ◽

D. V. Lang

Keyword(s):

Glow Discharge ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Silicon Films ◽

Intrinsic Stress ◽

Hydrogenated Amorphous

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Hydrogenated amorphous silicon films prepared in cascaded glow discharge reactors

Journal of Applied Physics ◽

10.1063/1.336467 ◽

1986 ◽

Vol 59 (5) ◽

pp. 1578-1586 ◽

Author(s):

O. S. Panwar ◽

P. N. Dixit ◽

R. Bhattacharyya ◽

V. V. Shah

Keyword(s):

Glow Discharge ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Silicon Films ◽

Hydrogenated Amorphous

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Electrical properties of boron-doped hydrogenated amorphous silicon films prepared by glow discharge decomposition in dilute silane

Thin Solid Films ◽

10.1016/0040-6090(89)90366-0 ◽

1989 ◽

Vol 176 (1) ◽

pp. 79-90 ◽

Author(s):

O.S. Panwar ◽

P.N. Dixit ◽

Ajay Tyagi ◽

Tanay Seth ◽

B.S. Satyanarayan ◽

...

Keyword(s):

Electrical Properties ◽

Glow Discharge ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Silicon Films ◽

Boron Doped ◽

Hydrogenated Amorphous

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Diagnostics of a glow discharge used to produce hydrogenated amorphous-silicon films. Quarterly progress report, October 15, 1981-January 14, 1982

10.2172/5518202 ◽

1982 ◽

Author(s):

A. Gallagher ◽

J. Scott

Keyword(s):

Glow Discharge ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Progress Report ◽

Silicon Films ◽

Hydrogenated Amorphous

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