Effect of power and pressure on the properties of hydrogenated amorphous silicon films prepared by DC glow discharge

1993 ◽  
Vol 31 (2) ◽  
pp. 215-226 ◽  
Author(s):  
T SETH ◽  
P DIXIT ◽  
O PANWAR ◽  
R BHATTACHARYYA
Keyword(s):  
Glow Discharge ◽  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Silicon Films ◽  
Dc Glow Discharge ◽  
Hydrogenated Amorphous

Hydrogenated amorphous silicon films obtained by a low pressure dc glow discharge

1988 ◽  
Vol 46 (3) ◽  
pp. 207-213 ◽  
Author(s):  
J. C. Delgado ◽  
J. Andreu ◽  
G. Sardin ◽  
J. Esteve ◽  
J. L. Morenza
Keyword(s):  
Glow Discharge ◽  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Low Pressure ◽  
Silicon Films ◽  
Dc Glow Discharge ◽  
Hydrogenated Amorphous

Hydrogenated amorphous silicon films prepared in cascaded glow discharge reactors

1986 ◽  
Vol 59 (5) ◽  
pp. 1578-1586 ◽  
Author(s):  
O. S. Panwar ◽  
P. N. Dixit ◽  
R. Bhattacharyya ◽  
V. V. Shah
Keyword(s):  
Glow Discharge ◽  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Silicon Films ◽  
Hydrogenated Amorphous
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