Preparation and characterization of hydrogenated amorphous-silicon films produced by ion plating and hydrogenated amorphous-boron films produced by glow-discharge decomposition. Final report, April 1, 1980-May 31, 1981

1981 ◽  
Author(s):  
F. Cocks ◽  
P. Jones
Keyword(s):  
Glow Discharge ◽  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Silicon Films ◽  
Final Report ◽  
Amorphous Boron ◽  
Ion Plating ◽  
Hydrogenated Amorphous

Optical Characterization of Very Thin Hydrogenated Amorphous Silicon Films Using Spectroscopic Ellipsometry

1991 ◽  
Vol 30 (Part 2, No. 11B) ◽  
pp. L1914-L1916 ◽  
Author(s):  
Tadashi Saitoh ◽  
Nobuyasu Hori ◽  
Katsuyuki Suzuki ◽  
Shigeo Iida
Keyword(s):  
Amorphous Silicon ◽  
Spectroscopic Ellipsometry ◽  
Hydrogenated Amorphous Silicon ◽  
Optical Characterization ◽  
Silicon Films ◽  
Hydrogenated Amorphous

Physical characterization of halogenated and hydrogenated amorphous silicon films

1980 ◽  
Vol 69 (3) ◽  
pp. 315-320 ◽  
Author(s):  
V. Augelli ◽  
R. Murri ◽  
S. Galassini ◽  
A. Tepore
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Silicon Films ◽  
Physical Characterization ◽  
Hydrogenated Amorphous

Light-induced conductivity changes in hydrogenated amorphous silicon films prepared in cascaded glow discharge reactors

1986 ◽  
Vol 135 (2) ◽  
pp. 165-172 ◽  
Author(s):  
O.S. Panwar ◽  
P.N. Dixit ◽  
R. Bhattacharyya ◽  
V.V. Shah
Keyword(s):  
Glow Discharge ◽  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Silicon Films ◽  
Hydrogenated Amorphous
Sign in / Sign up

Export Citation Format

Share Document