Conceptual design of a synchrotron radiation source dedicated to X-ray lithography
Keyword(s):
1995 ◽
Vol 359
(1-2)
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pp. 216-219
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Keyword(s):
2001 ◽
Vol 50
(7)
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pp. 690-694
1989 ◽
Vol 60
(7)
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pp. 1399-1402
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Keyword(s):
Upgraded X-ray topography and microtomography beamline at the Kurchatov synchrotron radiation source
2013 ◽
Vol 58
(3)
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pp. 517-522
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