Conceptual design of a synchrotron radiation source dedicated to X-ray lithography

1991 ◽  
Vol 104 (12) ◽  
pp. 1725-1733
Author(s):  
M. Bassetti ◽  
E. Bernieri ◽  
E. Burattini ◽  
A. Cattoni ◽  
V. Chimenti ◽  
...  
2013 ◽  
Vol 58 (3) ◽  
pp. 517-522 ◽  
Author(s):  
R. A. Senin ◽  
A. S. Khlebnikov ◽  
A. E. Vyazovetskova ◽  
I. A. Blinov ◽  
A. O. Golubitskii ◽  
...  

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