Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching

2006 ◽  
Vol 84 (1-2) ◽  
pp. 47-61 ◽  
Author(s):  
C. Hnatovsky ◽  
R.S. Taylor ◽  
E. Simova ◽  
P.P. Rajeev ◽  
D.M. Rayner ◽  
...  
Keyword(s):  
Laser Radiation ◽  
Femtosecond Laser ◽  
Chemical Etching ◽  
Femtosecond Laser Radiation ◽  
Selective Chemical ◽  
Selective Chemical Etching

scholarly journals Three-Dimensional Residue-Free Volume Removal inside Sapphire by High-Temperature Etching aftercmd="newline" Irradiation of Femtosecond Laser Pulses

2008 ◽  
Vol 2008 ◽  
pp. 1-4 ◽  
Author(s):  
Shigeki Matsuo ◽  
Kensuke Tokumi ◽  
Takuro Tomita ◽  
Shuichi Hashimoto
Keyword(s):  
High Temperature ◽  
Femtosecond Laser ◽  
Chemical Etching ◽  
Room Temperature ◽  
Three Dimensional ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Etching Technique ◽  
Selective Chemical ◽  
Selective Chemical Etching

We applied the femtosecond laser-assisted etching technique, that is, irradiation of focused femtosecond laser pulses followed by selective chemical etching, to volume removal inside sapphire. At room temperature, volume etching only slightly advanced while residue remained inside the volume. By increasing the etching temperature, complete volume etching without residue was achieved. Complete etching was, however, accompanied by undesirable phenomena of surface pits or cracks, which are expected to be excluded through further improvement of processing.

Scaling properties of a Si surface patterned by selective chemical etching

2004 ◽  
Vol 36 (1-3) ◽  
pp. 353-358 ◽  
Author(s):  
G. Wisz ◽  
T.Ya. Gorbach ◽  
P.S. Smertenko ◽  
A. Blahut ◽  
K. Zembrowska ◽  
...  
Keyword(s):  
Chemical Etching ◽  
Scaling Properties ◽  
Selective Chemical ◽  
Selective Chemical Etching

Nonlinear optical diagnostics of local crystallization of lead zirconate titanate films using femtosecond laser radiation

2015 ◽  
Vol 41 (5) ◽  
pp. 418-421 ◽  
Author(s):  
A. S. Elshin ◽  
N. Yu. Firsova ◽  
M. A. Marchenkova ◽  
V. I. Emel’yanov ◽  
I. P. Pronin ◽  
...  
Keyword(s):  
Laser Radiation ◽  
Femtosecond Laser ◽  
Lead Zirconate Titanate ◽  
Nonlinear Optical ◽  
Optical Diagnostics ◽  
Lead Zirconate ◽  
Femtosecond Laser Radiation ◽  
Zirconate Titanate
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