Laser Induced Stress Wave Thermometry for In-situ Temperature and Thickness Characterization of Single Crystalline Silicon Wafer: Part I—Theory and Apparatus

2010 ◽  
Vol 51 (7) ◽  
pp. 1103-1114 ◽  
Author(s):  
V. Vedantham ◽  
C. S. Suh ◽  
R. Chona
Keyword(s):  
Silicon Wafer ◽  
Stress Wave ◽  
Crystalline Silicon ◽  
Single Crystalline Silicon ◽  
Single Crystalline ◽  
Induced Stress

Pulsed Green-Laser Annealing for Single-Crystalline Silicon Film Transferred onto Silicon wafer and Non-alkaline Glass by Hydrogen-Induced Exfoliation

2007 ◽  
Vol 46 (1) ◽  
pp. 21-23 ◽  
Author(s):  
Norihito Kawaguchi ◽  
Ryusuke Kawakami ◽  
Ken-ichiro Nishida ◽  
Naoya Yamamoto ◽  
Miyuki Masaki ◽  
...  
Keyword(s):  
Silicon Wafer ◽  
Laser Annealing ◽  
Crystalline Silicon ◽  
Silicon Film ◽  
Green Laser ◽  
Single Crystalline Silicon ◽  
Single Crystalline

Reliability-based characterization of single crystalline silicon micromirrors for space applications

2009 ◽  
Author(s):  
Byung-Wook Yoo ◽  
Jae-Hyoung Park ◽  
Joo-Young Jin ◽  
I. H. Park ◽  
Yong-Kweon Kim
Keyword(s):  
Crystalline Silicon ◽  
Single Crystalline Silicon ◽  
Space Applications ◽  
Single Crystalline
Sign in / Sign up

Export Citation Format

Share Document