21412 Indentation Crack Patterns and Fracture Toughness of Single-Crystalline Silicon Wafer Introduced by A Vickers Indenter

2010 ◽  
Vol 2010.16 (0) ◽  
pp. 483-484
Author(s):  
Masayoshi MIYASAKA ◽  
Satoshi SUTOH ◽  
Masayoshi TATENO ◽  
Yoshiki GOTOH
2007 ◽  
Vol 46 (1) ◽  
pp. 21-23 ◽  
Author(s):  
Norihito Kawaguchi ◽  
Ryusuke Kawakami ◽  
Ken-ichiro Nishida ◽  
Naoya Yamamoto ◽  
Miyuki Masaki ◽  
...  

2006 ◽  
Vol 306-308 ◽  
pp. 601-606
Author(s):  
Seung Baek ◽  
Jae Mean Koo ◽  
Chang Sung Seok

Nano-indentation test is used widely to determine the fracture toughness of brittle materials and to provide information on important material properties such as the Young’s modulus and hardness. In this study, using nano-indentation testing, atomic force microscope (AFM), and finite element method (FEM), we performed the indentation fracture toughness and fracture strength measurement for a (100) single crystalline silicon at different load states. In addition, the loads of the phase transformation events during unloading were estimated by the load-depth curves. The phase transformation load and micro-crack propagation events at pop-out during the unloading process depended on the maximum applied indentation load.


2015 ◽  
Vol 77 ◽  
pp. 279-285 ◽  
Author(s):  
Jinyoun Cho ◽  
Hae-Na-Ra Shin ◽  
Jieun Lee ◽  
Yoonseok Choi ◽  
Jongchul Lee ◽  
...  

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