silicon film
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Micromachines ◽  
2022 ◽  
Vol 13 (1) ◽  
pp. 99
Author(s):  
Ziyuan Wang ◽  
Changde He ◽  
Wendong Zhang ◽  
Yifan Li ◽  
Pengfei Gao ◽  
...  

Capacitive micromachined ultrasound transducers (CMUTs) have broad application prospects in medical imaging, flow monitoring, and nondestructive testing. CMUT arrays are limited by their fabrication process, which seriously restricts their further development and application. In this paper, a vacuum-sealed device for medical applications is introduced, which has the advantages of simple manufacturing process, no static friction, repeatability, and high reliability. The CMUT array suitable for medical imaging frequency band was fabricated by a silicon wafer bonding technology, and the adjacent array devices were isolated by an isolation slot, which was cut through the silicon film. The CMUT device fabricated following this process is a 4 × 16 array with a single element size of 1 mm × 1 mm. Device performance tests were conducted, where the center frequency of the transducer was 3.8 MHz, and the 6 dB fractional bandwidth was 110%. The static capacitance (29.4 pF) and center frequency (3.78 MHz) of each element of the array were tested, and the results revealed that the array has good consistency. Moreover, the transmitting and receiving performance of the transducer was evaluated by acoustic tests, and the receiving sensitivity was −211 dB @ 3 MHz, −213 dB @ 4 MHz. Finally, reflection imaging was performed using the array, which provides certain technical support for the research of two-dimensional CMUT arrays in the field of 3D ultrasound imaging.


Author(s):  
Jian Zhang ◽  
Haochun Zhang ◽  
Dong Zhang ◽  
Wenbo Sun ◽  
Yiyi Li
Keyword(s):  

Doklady BGUIR ◽  
2021 ◽  
Vol 19 (7) ◽  
pp. 99-105
Author(s):  
A. S. Strogova

The regularities of changes in the concentration of an electrically active dopant in a nanostructured silicon film by changing the electrical resistivity depending on the doping conditions were investigated. The dependences of the changes in the obtained structures doped with rare-earth elements, such as La, Eu, Sm, Dy, Gd (lanthanides), on nanostructured silicon films are determined. The regularities of the obtained films changes and the temperature coefficient of resistance (TCR) change depending on the formation conditions are established. The regularities of the TCR are shown depending on the selected conditions for doping or non-doping of nanostructured silicon films with various impurities. It is shown that the main conditions under which the effect and change in the temperature coefficient of resistors resistance on thin films using rare-earth elements, such as oxygen, boron and phosphorus in the bulk of the film, is considered to be the temperature effect after deposition.


2021 ◽  
Vol 2015 (1) ◽  
pp. 012071
Author(s):  
S. V. Koromyslov ◽  
E.I. Ageev ◽  
E. Yu. Ponkratova ◽  
D. A. Zuev

Abstract Today the world demand for the creation of highly efficient nanoscale white light sources is growing. It happens because energy-efficient information and communication systems are being developed, in which optical signals are replacing electrical signals. For the fabrication of such devices, creating efficient nanoscale white light sources with high efficiency is very acute. Such structures obtained by current methods have a common disadvantages: a small spectral width and low efficiency. Here we demonstrate the development of metal-dielectric structures exploiting the single-step and lithography-free laser-induced dewetting of bi-layer gold silicon films and study their broadband photoluminescence.


Processes ◽  
2021 ◽  
Vol 9 (10) ◽  
pp. 1745
Author(s):  
Svetlana Zueva ◽  
Francesco Ferella ◽  
Valentina Corradini ◽  
Elena V. Baturina ◽  
Nicolò M. Ippolito ◽  
...  

The circular economy and maximization of environmental sustainability are increasingly becoming the vision and mission of companies competing in present-day global markets. In particular, in the energy sector, the transition from fossil fuels to renewable sources of energy has become the widespread mantra. One typical example is the deployment of devices which produce clean energy, such as solar photovoltaic panels and solar thermal panels, wind generators, tidal stream generators, wave power generators, etc. These are undoubtedly generating clean energy, but their manufacture creates hazardous by-products, the disposal of which results in increased environmental pollution. Chemical Vapor Deposition (CVD) is widely used in manufacturing of solar photovoltaic cells. In these processes, typically, crystalline silicon is precipitated from chlorosilanes, iodides, bromides and fluorides. Polluting by-products include deposition of a silicon film, formation of SiO2 powder and formation of toxic vapors of HF, SiH4 and PH3. Usually, these gaseous products are eliminated in a central scrubber, whose unwanted by-product consists in large quantities of hazardous fluorine-containing sludge. This article concerns an effective and inexpensive detoxification of fluorinated sludge, developed by the authors during research into the sludge collected from the scrubber of a PV cell manufacturing plant located in southern Italy.


Polymers ◽  
2021 ◽  
Vol 13 (17) ◽  
pp. 2980
Author(s):  
Chengbing Yu ◽  
Kaiqin Shi ◽  
Jinyan Ning ◽  
Zhe Zheng ◽  
Hualong Yu ◽  
...  

Water repellent is an important functional finish for cotton fabric. However, cotton fabrics often have poor washing resistance and other performances after actual finishing. In this study, based on the structural characteristics of cotton fiber and durability of water repellent, a cross-linked amino long-chain alkyl polysiloxane (CAHPS) was first prepared, and then reacted with modified silica. Finally, a chemically bonded organic–inorganic nanohybrid cross-linked polysiloxane (rSiO2-CAHPS) was fabricated. Furthermore, the rSiO2-CAHPS was emulsified to obtain a durable fluorine-free water repellent. The water repellent finishing for cotton fabric was carried out by the pad–dry–cure process. After finishing, the cotton fabric had good resistance to conventional liquids and excellent washing resistance, and still maintained good water repellency after 30 rounds of soaping. Moreover, properties including air permeability, mechanical property and whiteness are hardly affected after finishing. SEM and XPS characterization show that a layer of dense silicon film is formed on the surface of cotton fabric by rSiO2-CAHPS water repellent. The existence of nanosilica can improve the surface roughness of cotton fibers. The synergistic effect of fiber matrix, nanoparticles and CAHPS endows the fabric with a micro/nano-multi-scale micro-rough structure, which improves the water repellency of cotton fabric after water repellent finishing.


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