Precision control system of two-DOF stage with linear ultrasonic motor
2008 ◽
Vol 3
(4)
◽
pp. 421-425
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2009 ◽
Vol 3
(4)
◽
pp. 298
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2009 ◽
Vol 56
(4)
◽
pp. 1238-1253
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Keyword(s):
2009 ◽
Vol 56
(1)
◽
pp. 101-113
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2008 ◽
Vol 18
(6)
◽
pp. 567-575
◽
2019 ◽
Vol 51
(4)
◽
pp. 66-76
Keyword(s):