Software-Based Integral Product Architecture for Modular Motion Control System of a RFC Linear Motor Motion Stage: Model-Based DOB for Residual Vibration Suppression
2019 ◽
Vol 21
(2)
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pp. 203-209
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2016 ◽
Vol 2016.69
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pp. 53-54
2010 ◽
Vol 7
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pp. 109-117
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2021 ◽
Vol 1852
(2)
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pp. 022002
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