Precision Trajectory Tracking on XY Motion Stage Using Robust Interval Type-2 Fuzzy PI Sliding Mode Control Method
2020 ◽
Vol 21
(5)
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pp. 797-818
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2018 ◽
Vol 49
(15)
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pp. 3169-3181
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2018 ◽
Vol 1074
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pp. 012059
2020 ◽
Vol 77
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pp. 1348-1372
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2020 ◽
pp. 1-11
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