Ion microprobe analysis of integrated circuit structures

1978 ◽  
Vol 17 (2) ◽  
pp. 251-252
2007 ◽  
Vol 210 (14) ◽  
pp. 2453-2463 ◽  
Author(s):  
A. T. Marshall ◽  
P. L. Clode ◽  
R. Russell ◽  
K. Prince ◽  
R. Stern

1977 ◽  
Vol 49 (11) ◽  
pp. 1529-1536 ◽  
Author(s):  
G. J. Scilla ◽  
G. H. Morrison

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