Nonlinear theory for epitaxial growth of semiconductor alloys on vicinal surfaces

ABSTRACTThis paper reviews the problems that are generic to the direct epitaxy of quantum wire superlattices on {100} and {110} vicinal surfaces using molecular beam epitaxy.

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Dynamical Monte Carlo simulation of L11(CuPt)-type ordering during (001) epitaxial growth of III-V semiconductor alloys

Journal of Crystal Growth ◽

10.1016/0022-0248(91)90737-p ◽

1991 ◽

Vol 115 (1-4) ◽

pp. 194-198 ◽

Cited By ~ 19

Author(s):

S. Matsumura ◽

K. Takano ◽

N. Kuwano ◽

K. Oki

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Epitaxial Growth ◽

Semiconductor Alloys

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Monte Carlo simulation of L11-type ordering due to surface step migration in the epitaxial growth of III-–V semiconductor alloys

Journal of Crystal Growth ◽

10.1016/0022-0248(93)90375-7 ◽

1993 ◽

Vol 128 (1-4) ◽

pp. 499-502 ◽

Cited By ~ 11

Author(s):

M. Ishimaru ◽

S. Matsumura ◽

N. Kuwano ◽

K. Oki

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Epitaxial Growth ◽

Semiconductor Alloys ◽

Surface Step

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Adatom mobility on vicinal surfaces during epitaxial growth

Surface Science ◽

10.1016/0039-6028(92)90518-b ◽

1992 ◽

Vol 274 (2) ◽

pp. L535-L540 ◽

Cited By ~ 17

Author(s):

C.N. Luse ◽

A. Zangwill ◽

D.D. Vvedensky ◽

M.R. Wilby

Keyword(s):

Epitaxial Growth ◽

Vicinal Surfaces

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Dynamic model of epitaxial growth in ternary III-V semiconductor alloys

Physical Review B ◽

10.1103/physrevb.51.7104 ◽

1995 ◽

Vol 51 (11) ◽

pp. 7104-7111 ◽

Cited By ~ 7

Author(s):

Bing-Lin Gu ◽

Zhi-Feng Huang ◽

Jun Ni ◽

Jing-Zhi Yu ◽

Kaoru Ohno ◽

...

Keyword(s):

Epitaxial Growth ◽

Dynamic Model ◽

Semiconductor Alloys

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Anomalous scaling in epitaxial growth on vicinal surfaces: meandering and mounding instabilities in a linear growth equation with spatiotemporally correlated noise

Surface Science ◽

10.1016/j.susc.2008.07.031 ◽

2008 ◽

Vol 602 (17) ◽

pp. 2819-2827 ◽

Cited By ~ 16

Author(s):

Ajmi BH. Hamouda ◽

A. Pimpinelli ◽

R.J. Phaneuf

Keyword(s):

Epitaxial Growth ◽

Linear Growth ◽

Growth Equation ◽

Correlated Noise ◽

Anomalous Scaling ◽

Vicinal Surfaces

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Epitaxial growth of metastable semiconductor alloys: A novel simulation

Physical Review B ◽

10.1103/physrevb.38.13447 ◽

1988 ◽

Vol 38 (18) ◽

pp. 13447-13450 ◽

Cited By ~ 8

Author(s):

G. F. Preger ◽

C. M. Chaves ◽

Belita Koiller

Keyword(s):

Epitaxial Growth ◽

Semiconductor Alloys

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Evolution of surface morphology during epitaxial growth

Philosophical Transactions of the Royal Society of London Series A Physical and Engineering Sciences ◽

10.1098/rsta.1993.0103 ◽

1993 ◽

Vol 344 (1673) ◽

pp. 493-505 ◽

Cited By ~ 12

Keyword(s):

Epitaxial Growth ◽

Large Scale ◽

High Energy ◽

Atomic Scale ◽

High Energy Electron ◽

Vicinal Surfaces ◽

Basic Model ◽

Surface Steps ◽

Simulated Surface ◽

Surface Morphologies

We examine the type of information that can be obtained from Monte Carlo simulations of epitaxial growth. A basic model will be first introduced and some of the features that make it suitable for describing both atomic-scale processes and large-scale morphologies will be pointed out. The ability of this model to reproduce experimental data will then be addressed. The first example discussed will be growth on GaAs(OO1) vicinal surfaces, where the density of surface steps on the simulated surfaces reproduces quantitatively the evolution of the reflection high-energy electron diffraction (RHEED) intensity oscillations for appropriately chosen growth and diffraction conditions. This work will then be used as a basis for examining the predictions of the simulated surface morphologies on patterned substrates, based on comparisons with micro-RHEED measurements. Extensions of the basic model to more complex growth scenarios where the atomic constituents are delivered in the form of heteroatomic molecules will also be discussed.

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