Unambiguous determination of thickness and dielectric function of thin films by spectroscopic ellipsometry

1984 ◽  
Vol 113 (2) ◽  
pp. 101-113 ◽  
Author(s):  
H. Arwin ◽  
D.E. Aspnes
Keyword(s):  
Thin Films ◽  
Dielectric Function ◽  
Spectroscopic Ellipsometry ◽  
Unambiguous Determination

Accurate Determination of Optical Constants of Amorphous Absorbing Thin Films by Spectroscopic Ellipsometry

2015 ◽  
Vol 35 (4) ◽  
pp. 0431001 ◽  
Author(s):  
李江 Li Jiang ◽  
李沛 Li Pei ◽  
黄峰 Huang Feng ◽  
魏贤华 Wei Xianhua ◽  
葛芳芳 Ge Fangfang ◽  
...  
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry ◽  
Optical Constants ◽  
Accurate Determination

Determination of optical constants of solgel-derived inhomogeneous TiO_2 thin films by spectroscopic ellipsometry and transmission spectroscopy

1998 ◽  
Vol 37 (4) ◽  
pp. 691 ◽  
Author(s):  
Md. Mosaddeq-ur-Rahman ◽  
Guolin Yu ◽  
Kalaga Murali Krishna ◽  
Tetsuo Soga ◽  
Junji Watanabe ◽  
...  
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry ◽  
Optical Constants ◽  
Transmission Spectroscopy

Determination of the complex dielectric function of ion implanted amorphous SiC by spectroscopic ellipsometry

2003 ◽  
Vol 195 (1) ◽  
pp. 277-281 ◽  
Author(s):  
E. R. Shaaban ◽  
T. Lohner ◽  
P. Petrik ◽  
N. Q. Khánh ◽  
M. Fried ◽  
...  
Keyword(s):  
Dielectric Function ◽  
Spectroscopic Ellipsometry ◽  
Complex Dielectric Function ◽  
Amorphous Sic ◽  
Ion Implanted

Determination of optical constants of Cd1−xZnxTe thin films by spectroscopic ellipsometry

2003 ◽  
Vol 424 (1) ◽  
pp. 66-69 ◽  
Author(s):  
K. Prabakar ◽  
M. Sridharan ◽  
Sa.K. Narayandass ◽  
D. Mangalaraj ◽  
Vishnu Gopal
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry ◽  
Optical Constants
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