Molecular dynamics and quasidynamic simulations of low-energy particle bombardment effects during vapour-phase crystal growth: 10–50 eV Si and In atoms incident on (2 × 1)-terminated Si(001)

Thin Solid Films ◽

10.1016/0040-6090(95)06953-4 ◽

1996 ◽

Vol 272 (2) ◽

pp. 271-288 ◽

Author(s):

M. Kitabatake ◽

J.E. Greene

Keyword(s):

Molecular Dynamics ◽

Crystal Growth ◽

Particle Bombardment ◽

Vapour Phase ◽

Energy Particle ◽

Download Full-text

7509. Molecular dynamics simulations of low-energy particle bombardment effects during vapor-phase crystal growth: 10 eV Si atoms incident on Si(001)2 × 1 surfaces

Vacuum ◽

10.1016/0042-207x(91)91577-b ◽

1991 ◽

Vol 42 (10-11) ◽

pp. 675

Keyword(s):

Molecular Dynamics ◽

Crystal Growth ◽

Molecular Dynamics Simulations ◽

Vapor Phase ◽

Particle Bombardment ◽

Energy Particle ◽

Phase Crystal ◽

Dynamics Simulations

Download Full-text

Molecular dynamics simulations of low‐energy particle bombardment effects during vapor‐phase crystal growth: 10 eV Si atoms incident on Si(001)2×1 surfaces

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.576486 ◽

1990 ◽

Vol 8 (5) ◽

pp. 3726-3735 ◽

Author(s):

M. Kitabatake ◽

P. Fons ◽

J. E. Greene

Keyword(s):

Molecular Dynamics ◽

Crystal Growth ◽

Molecular Dynamics Simulations ◽

Vapor Phase ◽

Particle Bombardment ◽

Energy Particle ◽

Phase Crystal ◽

Dynamics Simulations

Download Full-text

Molecular dynamics and quasidynamics simulations of low‐energy particle bombardment effects during vapor‐phase crystal growth: Production and annihilation of defects due to 50 eV Si incident on (2×1)‐terminated Si(001)

Journal of Applied Physics ◽

10.1063/1.352962 ◽

1993 ◽

Vol 73 (7) ◽

pp. 3183-3194 ◽

Author(s):

M. Kitabatake ◽

J. E. Greene

Keyword(s):

Molecular Dynamics ◽

Crystal Growth ◽

Vapor Phase ◽

Particle Bombardment ◽

Energy Particle ◽

Phase Crystal ◽

Growth Production

Download Full-text

Molecular dynamics and quasidynamics simulations of the annealing of bulk and near‐surface interstitials formed in molecular‐beam epitaxial Si due to low‐energy particle bombardment during deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.577136 ◽

1991 ◽

Vol 9 (1) ◽

pp. 91-97 ◽

Author(s):

M. Kitabatake ◽

P. Fons ◽

J. E. Greene

Keyword(s):

Molecular Dynamics ◽

Particle Bombardment ◽

Molecular Beam ◽

Energy Particle ◽

Near Surface ◽

Molecular Beam Epitaxial

Download Full-text

Zirconia thin film deposition on silicon by reactive gas flow sputtering: the influence of low energy particle bombardment

Materials Science and Engineering A ◽

10.1016/0921-5093(91)90474-2 ◽

1991 ◽

Vol 140 ◽

pp. 528-533 ◽

Author(s):

T. Jung ◽

A. Westphal

Keyword(s):

Thin Film ◽

Particle Bombardment ◽

Gas Flow ◽

Thin Film Deposition ◽

Film Deposition ◽

Energy Particle ◽

Zirconia Thin Film ◽

Download Full-text

Ab initio molecular dynamics simulations of AlN responding to low energy particle radiation

Journal of Applied Physics ◽

10.1063/1.5009750 ◽

2018 ◽

Vol 123 (4) ◽

pp. 045904 ◽

Author(s):

Jianqi Xi ◽

Bin Liu ◽

Yanwen Zhang ◽

William J. Weber

Keyword(s):

Molecular Dynamics ◽

Ab Initio ◽

Molecular Dynamics Simulations ◽

Ab Initio Molecular Dynamics ◽

Energy Particle ◽

Particle Radiation ◽

Dynamics Simulations

Download Full-text

Thermal balance for measuring transport during vapour phase crystal growth

Journal of Crystal Growth ◽

10.1016/0022-0248(68)90053-5 ◽

1968 ◽

Vol 2 (2) ◽

pp. 113-114 ◽

Author(s):

D.A. Geary ◽

J.M. Hough

Keyword(s):

Crystal Growth ◽

Vapour Phase ◽

Thermal Balance ◽

Download Full-text

Cation dependence of the chemical modifications induced by low energy particle bombardment on inorganic salts: An XPS study

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/0168-583x(88)90210-8 ◽

1988 ◽

Vol 32 (1-4) ◽

pp. 204-210 ◽

Author(s):

Giovanni Marletta

Keyword(s):

Particle Bombardment ◽

Inorganic Salts ◽

Chemical Modifications ◽

Energy Particle ◽

Download Full-text

Property modification and synthesis by low energy particle bombardment concurrent with film growth

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(87)80194-5 ◽

1987 ◽

Vol 19-20 ◽

pp. 963-974 ◽

Author(s):

J.J. Cuomo ◽

S.M. Rossnagel

Keyword(s):

Particle Bombardment ◽

Film Growth ◽

Energy Particle ◽

Property Modification

Download Full-text

Formation of localized states and electronic excitation in solids during low-energy particle bombardment

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/0168-583x(93)95790-c ◽

1993 ◽

Vol 78 (1-4) ◽

pp. 140-143 ◽

Author(s):

Z. S̆roubek

Keyword(s):

Particle Bombardment ◽

Electronic Excitation ◽

Localized States ◽

Energy Particle

Download Full-text