5403. Transmission electron microscopy investigation of silicide formation on slightly oxidized silicon substrates
2002 ◽
Vol 82
(9)
◽
pp. 1741-1768
◽
2001 ◽
Vol 11
(1)
◽
pp. 3473-3476
◽
1977 ◽
Vol 12
(9)
◽
pp. 1862-1868
◽