Transmission electron microscopy study of ion implantation induced Si amorphization
1983 ◽
Vol 209-210
◽
pp. 351-356
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1991 ◽
Vol 10
(15)
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pp. 905-907
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2002 ◽
Vol 54
(2-3)
◽
pp. 222-228
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2010 ◽
Vol 132
(1-2)
◽
pp. 163-173
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1979 ◽
Vol 39
(6)
◽
pp. 757-783
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2002 ◽
Vol 82
(4)
◽
pp. 735-749
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1996 ◽
Vol 74
(2)
◽
pp. 57-66
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