Criteria for the extraction of SIMOX material parameters from spectroscopic ellipsometry data
1993 ◽
Vol 63
(1-4)
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pp. 40-44
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2020 ◽
Vol 38
(1)
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pp. 014001
1993 ◽
Vol 233
(1-2)
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pp. 148-152
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2017 ◽
Vol 421
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pp. 617-623
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