spectroscopic ellipsometry data Recently Published Documents

Deep Learning for Rapid Analysis of Spectroscopic Ellipsometry Data

Advanced Photonics Research ◽

10.1002/adpr.202100147 ◽

2021 ◽

pp. 2100147

Author(s):

Yifei Li ◽

Yifeng Wu ◽

Heshan Yu ◽

Ichiro Takeuchi ◽

Rafael Jaramillo

Keyword(s):

Deep Learning ◽

Rapid Analysis ◽

Ellipsometry Data ◽

On the optimization of knot allocation for B-spline parameterization of the dielectric function in spectroscopic ellipsometry data analysis

Journal of Applied Physics ◽

10.1063/5.0035456 ◽

2021 ◽

Vol 129 (3) ◽

pp. 034903

Author(s):

D. V. Likhachev

Keyword(s):

Data Analysis ◽

Dielectric Function ◽

B Spline ◽

Ellipsometry Data ◽

High-speed analysis of spectroscopic ellipsometry data using deep learning methods

10.1364/iprsn.2021.jw3d.4 ◽

2021 ◽

Author(s):

Yifei Li ◽

Yifeng Wu ◽

Heshan Yu ◽

Ichiro Takeuchi ◽

Rafael Jaramillo

Keyword(s):

Deep Learning ◽

High Speed ◽

Learning Methods ◽

High Speed Analysis ◽

Ellipsometry Data ◽

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

Application of a B-spline model dielectric function to infrared spectroscopic ellipsometry data analysis

10.1116/1.5126110 ◽

2020 ◽

Vol 38 (1) ◽

pp. 014001

Author(s):

Joel Mohrmann ◽

Thomas E. Tiwald ◽

Jeffrey S. Hale ◽

James N. Hilfiker ◽

Andrew C. Martin

Keyword(s):

Data Analysis ◽

Dielectric Function ◽

B Spline ◽

Infrared Spectroscopic ◽

Ellipsometry Data ◽

Parametric sensitivity analysis as an essential ingredient of spectroscopic ellipsometry data modeling: An application of the Morris screening method

Journal of Applied Physics ◽

10.1063/1.5126074 ◽

2019 ◽

Vol 126 (18) ◽

pp. 184901 ◽

Cited By ~ 1

Author(s):

D. V. Likhachev

Keyword(s):

Sensitivity Analysis ◽

Screening Method ◽

Data Modeling ◽

Essential Ingredient ◽

Parametric Sensitivity ◽

Parametric Sensitivity Analysis ◽

Ellipsometry Data ◽

Spectroscopic ellipsometry data analysis using penalized splines representation for the dielectric function

Thin Solid Films ◽

10.1016/j.tsf.2018.10.057 ◽

2019 ◽

Vol 669 ◽

pp. 174-180 ◽

Cited By ~ 3

Author(s):

D.V. Likhachev

Keyword(s):

Data Analysis ◽

Dielectric Function ◽

Penalized Splines ◽

Ellipsometry Data ◽

Physical and optical characterizations of Ge10Se90−xTex thin films in view of their spectroscopic ellipsometry data

Journal of Non-Crystalline Solids ◽

10.1016/j.jnoncrysol.2017.11.006 ◽

2018 ◽

Vol 481 ◽

pp. 314-320 ◽

Cited By ~ 17

Author(s):

S.S. Fouad ◽

G.A.M. Amin ◽

M.S. El-Bana

Keyword(s):

Thin Films ◽

Ellipsometry Data ◽

Convergence and precision characteristics of finite difference time domain method for the analysis of spectroscopic ellipsometry data at oblique incidence

Applied Surface Science ◽

10.1016/j.apsusc.2016.12.165 ◽

2017 ◽

Vol 421 ◽

pp. 878-883

Author(s):

Yishu Foo ◽

Juan Antonio Zapien

Keyword(s):

Finite Difference ◽

Time Domain ◽

Finite Difference Time Domain ◽

Oblique Incidence ◽

Time Domain Method ◽

Domain Method ◽

Difference Time ◽

Ellipsometry Data ◽

Model selection in spectroscopic ellipsometry data analysis: Combining an information criteria approach with screening sensitivity analysis

Applied Surface Science ◽

10.1016/j.apsusc.2016.09.139 ◽

2017 ◽

Vol 421 ◽

pp. 617-623 ◽

Cited By ~ 3

Author(s):

D.V. Likhachev

Keyword(s):

Sensitivity Analysis ◽

Data Analysis ◽

Model Selection ◽

Information Criteria ◽

Screening Sensitivity ◽

Ellipsometry Data ◽