Protective behaviour against high temperature oxidation of silicon nitride films synthesized by ion-beam-assisted deposition

1992 ◽  
Vol 51 (1-3) ◽  
pp. 227-231 ◽  
Author(s):  
Chen Yuanru ◽  
Liu Shikai ◽  
Liu Xianghuai ◽  
Zou Shichang ◽  
Shang Zhenkui ◽  
...  
1993 ◽  
Vol 126-128 ◽  
pp. 519-522
Author(s):  
M. O'Reilly ◽  
Richard J. Fordham ◽  
James F. Norton ◽  
J. Corish ◽  
E. Bullock

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