Development and characterization of TiN coatings by ion beam assisted deposition process for improved wear resistance

1995 ◽  
Vol 76-77 ◽  
pp. 437-449 ◽  
Author(s):  
Jeon G. Han ◽  
Joo S. Yoon ◽  
Byung H. Choi ◽  
In S. Choi
2001 ◽  
Vol 388 (1-2) ◽  
pp. 195-200 ◽  
Author(s):  
Sanjiv Kumar ◽  
V.S Raju ◽  
R Shekhar ◽  
J Arunachalam ◽  
A.S Khanna ◽  
...  

1988 ◽  
Vol 128 ◽  
Author(s):  
Albert L. Chang ◽  
R. A. Kant

ABSTRACTOne of the advantages of the ion beam assisted deposition process is its controllability of the processing parameters such as: ion-to-atom arrival ratio and the ion energy. In this study, the effects of the nitrogen ion energy (from 1 KV to 30KV) on the TiN film morphology and microstructures were systematically investigated as a function of ion-to-atom arrival ratios, using TEM, XTEM, SEM, ESCA and other analytical techniques.


1988 ◽  
Vol 140 ◽  
Author(s):  
Albert L. Chang ◽  
R. A. Kant

AbstractOne of the advantages of the ion beam assisted deposition process is its controllability of the processing parameters such as: ion-to-atom arrival ratio and the ion energy. In this study, the effects of the nitrogen ion energy (from 1 KV to 30KV) on the TiN film morphology and microstructures were systematically investigated as a function of ion-to-atom arrival ratios, using TEM, XTEM, SEM, ESCA and other analytical techniques.


2004 ◽  
Vol 822 ◽  
Author(s):  
A. Morata ◽  
A. Tarancón ◽  
G. Dezanneau ◽  
F. Peiró ◽  
J. R. Morante

AbstractIn the present work, the screen printing technique has been used to deposit thick films of Zr0.84Y016O1.92 (8YSZ). In order to control the final porosity in view of a specific application (SOFCs or gas sensor), an experimental design based on analysis of variances (ANOVA) has been carried out. From this, we were able to determine the influence of several technological parameters on films porosity and grain size. The films obtained have been analysed with both Scanning Electron Microscopy (SEM) and Focused Ion Beam (FIB) combined with SEM. We show that only the combination of experimental design and advanced observation technique such as Focused Ion Beam allowed us to extract significant information for the improvement of the deposition process.


2001 ◽  
Vol 382 (1-2) ◽  
pp. 61-68 ◽  
Author(s):  
L. Dumas ◽  
E. Quesnel ◽  
J.-Y. Robic ◽  
Y. Pauleau

1991 ◽  
Vol 139 ◽  
pp. 225-229 ◽  
Author(s):  
X.Y. Li ◽  
F.J. Wang ◽  
T.C. Ma ◽  
Y.K. Wang
Keyword(s):  
Ion Beam ◽  

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