High energy approximation in dynamic theory of electron diffraction involves some intrinsic problems. First, the loss of theoretical strictness makes it difficult to comprehend the phenomena of electron diffraction. Secondly, it is difficult to believe that the approximation is reasonable especially in the following cases: 1) when accelerating voltage is not sufficiently high, 2) when the specimen is thick, 3) when the angle between the surface normal of the specimen and zone axis is large, and 4) when diffracted beam with large diffraction angle is included in the calculation. However, until now the method to calculate the many beam dynamic electron diffraction without the high energy approximation has not been proposed. For this reason, the authors propose a method to eliminate the high energy approximation in the calculation of many beam dynamic electron diffraction. In this method, a perfect crystal with flat surface was assumed. The method was applied to the calculation of [111] zone axis CBED patterns of Si.
