On epitaxial thin film growth by chemical vapour deposition from a silane, germane, hydrogen chloride and hydrogen gas mixture

1993 ◽  
Vol 19 (3) ◽  
pp. 251-256
Author(s):  
H. Kühne ◽  
Th. Morgenstern ◽  
P. Zaumseil ◽  
D. Krüger ◽  
G. Ritter ◽  
...  
Keyword(s):  
Thin Film ◽  
Hydrogen Chloride ◽  
Vapour Deposition ◽  
Film Growth ◽  
Chemical Vapour ◽  
Hydrogen Gas ◽  
Thin Film Growth ◽  
Gas Mixture ◽  
Epitaxial Thin Film ◽  
Epitaxial Thin Film Growth

On the solutions of a fourth order parabolic equation modeling epitaxial thin film growth

2016 ◽  
Vol 66 (3) ◽  
Author(s):  
Ning Duan ◽  
Xiaopeng Zhao ◽  
Xiufang Zhao
Keyword(s):  
Thin Film ◽  
Parabolic Equation ◽  
Fourth Order ◽  
Film Growth ◽  
Thin Film Growth ◽  
Equation Modeling ◽  
Epitaxial Thin Film ◽  
Epitaxial Thin Film Growth ◽  
Order Parabolic Equation ◽  
Fourth Order Parabolic Equation

AbstractIn this paper, we study the existence and uniqueness of global weak solution, the regularity of the solutions and the existence of global attractor for a fourth order parabolic equation modeling epitaxial thin film growth with Neumann boundary conditions in two space dimensions.

Epitaxial Thin Film Growth of Europium Dihydride

2020 ◽  
Vol 20 (9) ◽  
pp. 5903-5907
Author(s):  
Yuya Komatsu ◽  
Ryota Shimizu ◽  
Markus Wilde ◽  
Shigeru Kobayashi ◽  
Yuki Sasahara ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Thin Film Growth ◽  
Epitaxial Thin Film ◽  
Epitaxial Thin Film Growth
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