CHARACTERIZATION OF MULTILAYER-COATED CONCAVE DIFFRACTION GRATINGS IN THE EUV

Author(s):  
JAY BIXLER ◽  
DAN DIETRICH ◽  
TROY BARBEE
1998 ◽  
Vol 37 (Part 1, No. 4A) ◽  
pp. 1842-1846 ◽  
Author(s):  
Gaoyang Zhao ◽  
Noboru Tohge ◽  
Junji Nishii

2004 ◽  
Vol 75 (11) ◽  
pp. 4419-4422 ◽  
Author(s):  
Zhongwen Hu ◽  
Zuping Liu ◽  
Qiuping Wang

1981 ◽  
Vol 20 (2) ◽  
pp. 245 ◽  
Author(s):  
M. C. Hutley ◽  
W. R. Hunter

2002 ◽  
Vol 49 (11) ◽  
pp. 1907-1917 ◽  
Author(s):  
ELENA SOKOLOVA ◽  
BOB KRUIZINGA ◽  
TON VAN VALKENBURG ◽  
JOS GROOTE SCHAARSBERG

Author(s):  
Marcell Kiss ◽  
Teodoro Graziosi ◽  
Adrien Toros ◽  
Toralf Scharf ◽  
Olivier J.F. Martin ◽  
...  

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