CHARACTERIZATION OF MULTILAYER-COATED CONCAVE DIFFRACTION GRATINGS IN THE EUV
1998 ◽
Vol 37
(Part 1, No. 4A)
◽
pp. 1842-1846
◽
2004 ◽
Vol 75
(11)
◽
pp. 4419-4422
◽
2002 ◽
Vol 49
(11)
◽
pp. 1907-1917
◽