Plasma Deposition and Etching of Diamond-Like Carbon Films
1991 ◽
pp. 851-856
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Keyword(s):
2003 ◽
Vol 173
(1)
◽
pp. 67-73
◽
Keyword(s):
2007 ◽
Vol 74
(5)
◽
pp. 704-709
◽
Keyword(s):