Plasma Deposition and Etching of Diamond-Like Carbon Films

Applications of Diamond Films and Related Materials - Proceedings of the First International Conference on the Applications of Diamond Films and Related Materials – ADC '91 Auburn, Alabama, U.S.A., August 17–22, 1991 - Materials Science Monographs ◽

10.1016/b978-0-444-89162-4.50135-4 ◽

1991 ◽

pp. 851-856

Author(s):

J. Seth ◽

R. Padiyath ◽

S.V. Babu

Keyword(s):

Plasma Deposition ◽

Carbon Films ◽

Diamond Like Carbon

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Impacts of substrate bias and dilution gas on the properties of Si-incorporated diamond-like carbon films by plasma deposition using organosilane as a Si source

Thin Solid Films ◽

10.1016/j.tsf.2018.03.075 ◽

2018 ◽

Vol 654 ◽

pp. 38-48 ◽

Author(s):

H. Nakazawa ◽

S. Miura ◽

K. Nakamura ◽

Y. Nara

Keyword(s):

Plasma Deposition ◽

Carbon Films ◽

Diamond Like Carbon ◽

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Mechanical properties and platelet adhesion behavior of diamond-like carbon films synthesized by pulsed vacuum arc plasma deposition

Surface Science ◽

10.1016/s0039-6028(03)00487-4 ◽

2003 ◽

Vol 531 (2) ◽

pp. 177-184 ◽

Author(s):

Y.X. Leng ◽

J.Y. Chen ◽

P. Yang ◽

H. Sun ◽

G.J. Wan ◽

...

Keyword(s):

Mechanical Properties ◽

Platelet Adhesion ◽

Plasma Deposition ◽

Carbon Films ◽

Diamond Like Carbon ◽

Adhesion Behavior

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Diamond-like carbon films prepared by rf plasma deposition

Vacuum ◽

10.1016/0042-207x(90)93957-k ◽

1990 ◽

Vol 41 (4-6) ◽

pp. 1360-1363 ◽

Author(s):

X.-D. Pan ◽

E.A. Maydell ◽

R.H. Milne ◽

D.J. Fabian

Keyword(s):

Plasma Deposition ◽

Carbon Films ◽

Rf Plasma ◽

Diamond Like Carbon

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Structure and properties of amorphous diamond-like carbon films produced by ion beam assisted plasma deposition

Journal of Materials Engineering and Performance ◽

10.1007/bf02645683 ◽

1993 ◽

Vol 2 (6) ◽

pp. 839-842 ◽

Author(s):

J. Chen ◽

J. R. Conrad ◽

R. A. Dodd

Keyword(s):

Plasma Deposition ◽

Ion Beam ◽

Carbon Films ◽

Diamond Like Carbon ◽

Structure And Properties

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Plasma deposition and characterization of silicon oxide-containing diamond-like carbon films obtained from CH4:SiH4:O2 gas mixtures

Thin Solid Films ◽

10.1016/j.tsf.2007.10.119 ◽

2008 ◽

Vol 516 (8) ◽

pp. 1890-1897 ◽

Author(s):

J.C. Damasceno ◽

S.S. Camargo

Keyword(s):

Silicon Oxide ◽

Plasma Deposition ◽

Gas Mixtures ◽

Carbon Films ◽

Diamond Like Carbon

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Effects of frequency of pulsed substrate bias on structure and properties of silicon-doped diamond-like carbon films by plasma deposition

Thin Solid Films ◽

10.1016/j.tsf.2014.11.078 ◽

2015 ◽

Vol 574 ◽

pp. 93-98 ◽

Author(s):

Hideki Nakazawa ◽

Ryosuke Kamata ◽

Soushi Miura ◽

Saori Okuno

Keyword(s):

Plasma Deposition ◽

Carbon Films ◽

Diamond Like Carbon ◽

Substrate Bias ◽

Structure And Properties ◽

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Mechanical properties and thermomechanical stability of diamond-like carbon films synthesized by pulsed vacuum arc plasma deposition

Surface and Coatings Technology ◽

10.1016/s0257-8972(03)00442-0 ◽

2003 ◽

Vol 173 (1) ◽

pp. 67-73 ◽

Author(s):

Y.X. Leng ◽

J.Y. Chen ◽

P. Yang ◽

H. Sun ◽

G.J. Wan ◽

...

Keyword(s):

Mechanical Properties ◽

Plasma Deposition ◽

Carbon Films ◽

Diamond Like Carbon ◽

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Determination of the optical bandgap for diamond-like carbon films obtained by laser plasma deposition

Journal of Applied Spectroscopy ◽

10.1007/s10812-007-0113-9 ◽

2007 ◽

Vol 74 (5) ◽

pp. 704-709 ◽

Author(s):

V. K. Goncharov ◽

D. R. Ismailov ◽

O. R. Lyudchik ◽

S. A. Petrov ◽

M. V. Puzyrev

Keyword(s):

Laser Plasma ◽

Plasma Deposition ◽

Carbon Films ◽

Optical Bandgap ◽

Diamond Like Carbon

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Plasma deposition and etching of diamond-like carbon films

AIChE Journal ◽

10.1002/aic.690370307 ◽

1991 ◽

Vol 37 (3) ◽

pp. 367-376 ◽

Author(s):

Moses David ◽

Raghunath Padiyath ◽

Suryadevara V. Babu

Keyword(s):

Plasma Deposition ◽

Carbon Films ◽

Diamond Like Carbon

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Structure and properties of fluorine doped diamond-like carbon films synthesized by pulsed vacuum arc plasma deposition

The 31st IEEE International Conference on Plasma Science, 2004. ICOPS 2004. IEEE Conference Record - Abstracts. ◽

10.1109/plasma.2004.1339976 ◽

2004 ◽

Author(s):

Zh.Q. Yao ◽

P. Yang ◽

N. Huang ◽

H. Sun ◽

J. Wang

Keyword(s):

Plasma Deposition ◽

Carbon Films ◽

Diamond Like Carbon ◽

Structure And Properties

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