Structure and properties of fluorine doped diamond-like carbon films synthesized by pulsed vacuum arc plasma deposition

The 31st IEEE International Conference on Plasma Science, 2004. ICOPS 2004. IEEE Conference Record - Abstracts. ◽

10.1109/plasma.2004.1339976 ◽

2004 ◽

Author(s):

Zh.Q. Yao ◽

P. Yang ◽

N. Huang ◽

H. Sun ◽

J. Wang

Keyword(s):

Plasma Deposition ◽

Carbon Films ◽

Vacuum Arc ◽

Diamond Like Carbon ◽

Arc Plasma ◽

Structure And Properties

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Mechanical properties and platelet adhesion behavior of diamond-like carbon films synthesized by pulsed vacuum arc plasma deposition

Surface Science ◽

10.1016/s0039-6028(03)00487-4 ◽

2003 ◽

Vol 531 (2) ◽

pp. 177-184 ◽

Cited By ~ 57

Author(s):

Y.X. Leng ◽

J.Y. Chen ◽

P. Yang ◽

H. Sun ◽

G.J. Wan ◽

...

Keyword(s):

Mechanical Properties ◽

Platelet Adhesion ◽

Plasma Deposition ◽

Carbon Films ◽

Vacuum Arc ◽

Diamond Like Carbon ◽

Arc Plasma ◽

Adhesion Behavior

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Mechanical properties and thermomechanical stability of diamond-like carbon films synthesized by pulsed vacuum arc plasma deposition

Surface and Coatings Technology ◽

10.1016/s0257-8972(03)00442-0 ◽

2003 ◽

Vol 173 (1) ◽

pp. 67-73 ◽

Cited By ~ 17

Author(s):

Y.X. Leng ◽

J.Y. Chen ◽

P. Yang ◽

H. Sun ◽

G.J. Wan ◽

...

Keyword(s):

Mechanical Properties ◽

Plasma Deposition ◽

Carbon Films ◽

Vacuum Arc ◽

Diamond Like Carbon ◽

Arc Plasma

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Structure and properties of amorphous diamond-like carbon films produced by ion beam assisted plasma deposition

Journal of Materials Engineering and Performance ◽

10.1007/bf02645683 ◽

1993 ◽

Vol 2 (6) ◽

pp. 839-842 ◽

Cited By ~ 17

Author(s):

J. Chen ◽

J. R. Conrad ◽

R. A. Dodd

Keyword(s):

Plasma Deposition ◽

Ion Beam ◽

Carbon Films ◽

Diamond Like Carbon ◽

Structure And Properties

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Effects of frequency of pulsed substrate bias on structure and properties of silicon-doped diamond-like carbon films by plasma deposition

Thin Solid Films ◽

10.1016/j.tsf.2014.11.078 ◽

2015 ◽

Vol 574 ◽

pp. 93-98 ◽

Cited By ~ 9

Author(s):

Hideki Nakazawa ◽

Ryosuke Kamata ◽

Soushi Miura ◽

Saori Okuno

Keyword(s):

Plasma Deposition ◽

Carbon Films ◽

Diamond Like Carbon ◽

Substrate Bias ◽

Structure And Properties ◽

Silicon Doped

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A comparative study of fluorinated amorphous carbon films synthesized by pulsed vacuum arc plasma deposition and by PECVD

The 31st IEEE International Conference on Plasma Science, 2004. ICOPS 2004. IEEE Conference Record - Abstracts. ◽

10.1109/plasma.2004.1339977 ◽

2004 ◽

Author(s):

Zh.Q. Yao ◽

P. Yang ◽

N. Huang ◽

H. Sun ◽

J. Wang

Keyword(s):

Comparative Study ◽

Amorphous Carbon ◽

Plasma Deposition ◽

Carbon Films ◽

Vacuum Arc ◽

Arc Plasma ◽

Amorphous Carbon Films

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Influence of duty ratio of pulsed bias on structure and properties of silicon-doped diamond-like carbon films by plasma deposition

Thin Solid Films ◽

10.1016/j.tsf.2013.05.089 ◽

2013 ◽

Vol 539 ◽

pp. 134-138 ◽

Cited By ~ 4

Author(s):

Hideki Nakazawa ◽

Ryosuke Kamata ◽

Soushi Miura ◽

Saori Okuno

Keyword(s):

Plasma Deposition ◽

Carbon Films ◽

Duty Ratio ◽

Diamond Like Carbon ◽

Structure And Properties ◽

Silicon Doped

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EFFECT OF SUBSTRATE TEMPERATURE ON PROPERTIES OF THE DIAMOND-LIKE CARBON DEPOSITED BY PULSED VACUUM ARC PLASMA DEPOSITION

Journal of Mechanical Engineering ◽

10.3901/jme.2004.07.020 ◽

2004 ◽

Vol 40 (07) ◽

pp. 20

Author(s):

Yongxiang Leng

Keyword(s):

Substrate Temperature ◽

Plasma Deposition ◽

Vacuum Arc ◽

Diamond Like Carbon ◽

Arc Plasma

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Influence of hydrogen on the structure and properties of tetrahedral amorphous carbon films obtained by the filtered cathodic vacuum arc technique

Philosophical Magazine B ◽

10.1080/014186399256466 ◽

1999 ◽

Vol 79 (10) ◽

pp. 1647-1658

Author(s):

L. K. Cheah, X. Shi, E. Liu, B. K. Tay

Keyword(s):

Amorphous Carbon ◽

Carbon Films ◽

Vacuum Arc ◽

Structure And Properties ◽

Amorphous Carbon Films ◽

Tetrahedral Amorphous Carbon ◽

Filtered Cathodic Vacuum Arc

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Structure and Properties of Periodic Multilayer Metal/nitride Coatings Deposited from Filtered Vacuum-arc Plasma Using Ti-Al-Y Cathode

2020 IEEE 10th International Conference Nanomaterials: Applications & Properties (NAP) ◽

10.1109/nap51477.2020.9309561 ◽

2020 ◽

Author(s):

Vladimir Vasyliev ◽

Alexander Luchaninov ◽

Elena Reshetnyak ◽

Vladimir Strel'nitskij

Keyword(s):

Vacuum Arc ◽

Arc Plasma ◽

Structure And Properties ◽

Metal Nitride ◽

Nitride Coatings ◽

Multilayer Metal

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Comparative properties of titanium oxide biomaterials grown by pulsed vacuum arc plasma deposition and by unbalanced magnetron sputtering(UBM)

The 30th International Conference on Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. ◽

10.1109/plasma.2003.1229980 ◽

2003 ◽

Author(s):

Y.X. Leng ◽

J.Y. Chen ◽

G.J. Wan ◽

H. Sun ◽

P. Yang ◽

...

Keyword(s):

Magnetron Sputtering ◽

Titanium Oxide ◽

Plasma Deposition ◽

Vacuum Arc ◽

Arc Plasma ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron

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