Experimental thermal regulation of an ultra-high precision metrology system by combining Modal Identification Method and Model Predictive Control
2016 ◽
Vol 104
◽
pp. 504-515
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2015 ◽
Vol 78
◽
pp. 720-730
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Keyword(s):
2015 ◽
Vol 48
(28)
◽
pp. 1166-1171
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Keyword(s):
1994 ◽
Vol 27
(9-10)
◽
pp. 83-93
◽
2015 ◽
Vol 36
(8)
◽
pp. 2099-2114
Keyword(s):
Keyword(s):
1997 ◽
Vol 21
(1-2)
◽
pp. S893-S897
Keyword(s):
1997 ◽
Vol 21
(1-2)
◽
pp. S873-S879
◽