Fabrication of p-type ZnMgO codoped with Al and N using dc reactive magnetron sputtering

2006 ◽  
Vol 253 (4) ◽  
pp. 2345-2347 ◽  
Author(s):  
Y.M. Ye ◽  
Z.Z. Ye ◽  
L.L. Chen ◽  
B.H. Zhao ◽  
L.P. Zhu
Keyword(s):  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Dc Reactive Magnetron Sputtering ◽  
P Type

Fabrication and post-anneal activation of p-type ZnMgO:Li film using dc reactive magnetron sputtering

2008 ◽  
Vol 62 (17-18) ◽  
pp. 2554-2556 ◽  
Author(s):  
Lingxiang Chen ◽  
Zhizhen Ye ◽  
Shisheng Lin ◽  
Haiping He ◽  
Yujia Zeng ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Dc Reactive Magnetron Sputtering ◽  
P Type

Preparation and characteristics of p-type ZnO films by DC reactive magnetron sputtering

2003 ◽  
Vol 253 (1-4) ◽  
pp. 258-264 ◽  
Author(s):  
Zhi-Zhen Ye ◽  
Jian-Guo Lu ◽  
Han-Hong Chen ◽  
Yin-Zhu Zhang ◽  
Lei Wang ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Zno Films ◽  
Reactive Magnetron ◽  
Dc Reactive Magnetron Sputtering ◽  
P Type
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